| Affiliation: | 1. Institute of Biochemical Engineering, Technische Universit?t Braunschweig, Braunschweig, Germany;2. Institute of Surface Technology, Technische Universit?t Braunschweig, Braunschweig, Germany;3. Institute of Microtechnology, Technische Universit?t Braunschweig, Braunschweig, Germany;4. Institut de Microelectrònica de Barcelona (IMB‐CNM, CSIC), Barcelona, Spain;5. Mechatronics Engineering Department, German Jordanian University, Mushaqar, Jordan;6. +49‐0‐531/391‐7653+49‐0‐531/391‐7652 |
