On chip optofluidic low-pressure monitoring device

We present an on chip optofluidic surface deformable liquid Dove prism (LDP) based low-fluid flow pressure monitoring device. The unique design of the device in combination with liquid and soft solid enabled by the total internal reflection of light makes the sensor highly sensitive and compatible with the integration of a microfluidic and/or Lab-on-a-chip device. A layer-by-layer soft lithographic (LSL) and 3D printing technique are exploited to make the device. We have used Polydimethylsiloxane (PDMS) as the layer material and two variety of liquids (a) immersion oil (IO) and (b) di-iodomethane (DI) as refracting medium to construct the LDP sensor. Optical ray tracing simulation is performed to optimize the sensor. The pressure sensor shows sensitivity as high as ±28.5 mV per 50 Pa pressure with an error ± 2.5 mV and repeatability of ~99.56% at full scale. We have shown the applicability of the sensor by capturing and analyzing respiratory pressure signals of some human subjects at numerous conditions.