Helicon plasma in a nonuniform magnetic field |
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Authors: | O V Braginskii A N Vasil’eva A S Kovalev |
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Institution: | (1) Institute of Nuclear Physics, Moscow State University, Vorob’evy gory, Moscow, 119899, Russia |
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Abstract: | The distributions of the electron density in a plasma produced by helicon waves and the correspond-ing wave amplitudes and phases are studied experimentally. The measurements were carried out in an argon plasma at a pressure of 3 mtorr and at an input RF power of up to 600 W. The magnetic field was caried in the range from 0 to 200 G. The efficiency of plasma production in both uniform and nonuniform fields is investigated. It is shown that, in a nonuniform magnetic field, the electron density can be substantially increased (up to 5×1012 cm?3) by placing an antenna in the region in which the magnetic field is weaker than in the main plasma. |
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