Affiliation: | 1. Materials Science and Engineering Division, Material Measurement Laboratory, NIST, Gaithersburg, MD, USA;2. Semiconductor and Dimensional Metrology Division, Physical Measurement Laboratory, NIST, Gaithersburg, MD, USA;3. Department of Electrical Engineering, Penn State University University Park, PA, USA;4. Institute of Computational Physics, Zurich University of Applied Sciences, ZHAW, Winterthur, Switzerland;5. Department of Electrical and Computer Engineering, Old Dominion University, Norfolk, VA, USA |