Cold plasma functionalized TeraHertz BioMEMS for enzyme reaction analysis |
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| Authors: | Abdennour Abbas Anthony Treizebre Philippe Supiot Nour-Eddine Bourzgui Didier Guillochon Dominique Vercaigne-Marko Bertrand Bocquet |
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| Institution: | aInstitute of Electronics, Microelectronics and Nanotechnology (UMR-CNRS 8520), University of Lille1, F59655 Villeneuve d’Ascq, France;bLaboratory of Process Engineering of Reactive Fluids-to-Materials Interactions (EA 3571), University of Lille1, F59655 Villeneuve d’Ascq, France;cLaboratory of Biological Processes, Enzymatic and Microbial Engineering (EA 1026), University of Lille1, F59655 Villeneuve d’Ascq, France |
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| Abstract: | In this paper, we describe the development, functionalization and functionality testing of a TeraHertz (THz) Bio-MicroElectroMechanical System (BioMEMS) dedicated to enzyme reaction analysis. The microdevice was fabricated by mixing clean room microfabrication with cold plasma deposition. The first is used to build the microfluidic circuits and the THz sensor, while the later serves for the polymerization of allylamine using a homemade glow discharge plasma reactor for a subsequent immobilization of enzymatic biocatalysts. Thermal stability of the deposited plasma polymer has been investigated by infrared spectroscopy. Fluorescent detection confirmed the efficiency of the immobilization and the enzyme hydrolysis into the BioMEMS microchannels. For the first time, the progression of the hydrolysis reaction over time was monitored by the THz sensor connected to a vectorial network analyzer. Preliminary results showed that sub-THz transmission measurements are able to discriminate different solid films, various aqueous media and exhibit specific transmission behavior for the enzyme hydrolysis reaction in the spectral range 0.06–0.11 THz. |
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| Keywords: | Biocatalysis BioMEMS Cold plasma Sub-TeraHertz spectroscopy Thin films |
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