Spatial distribution of the electron component parameters in the nitrogen plasma of a low-pressure electrode microwave Discharge |
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| Authors: | Yu. A. Lebedev G. V. Krashevskaya M. A. Gogoleva |
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| Affiliation: | 1.Topchiev Institute of Petrochemical Synthesis,Russian Academy of Sciences,Moscow,Russia;2.National Research Nuclear University Moscow Engineering Physics Institute,Moscow,Russia |
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| Abstract: | Spatial distributions of charged particle concentration, electron temperature, and DC potential in an electrode microwave discharge in nitrogen at a pressure of 1 Torr have been measured using the double electric probe method. It has been shown that, near the electrode/antenna, the charged particle concentration exceeds a critical value. The concentration and heterogeneity of the discharge increase with increasing microwave power. |
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