Creation and investigation of powerful EUV sources (λ ≈ 13.5 nm) |
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Authors: | V M Borisov G N Borisova A Yu Vinokhodov A S Ivanov Yu B Kiryukhin V A Mishchenko A V Prokofiev O B Khristoforov |
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Institution: | (1) Rutherford Appleton Laboratory, Didcot, UK; |
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Abstract: | Results are presented from experimental studies of repetitively pulsed EUV (λ = 13.5 ± 0.135 nm) sources based on a laser-initiated
discharge in tin vapor between rotating disk electrodes. Radiative characteristics of two sources with different systems of
tin supply onto the electrode surface and different types of power supply have been compared. A number of new effects have
been revealed at pulse repetition rates as high as ∼4000 Hz. A mean radiation power of 520 W into the 2π solid angle has been
achieved in the spectral band 13.5 ± 0.135 nm at a deposited electrical power of 24 kW. |
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