Institution: | 1. University of Freiburg, Department of Microsystems Engineering (IMTEK), Laboratory for Sensors, Georges-Koehler-Allee 103, 79110 Freiburg, Germany;2. University of Freiburg, Freiburg Materials Research Center (FMF), Stefan-Meier-Straße 21, 79104 Freiburg, Germany;3. ETH Zurich, Department of Biosystems Science and Engineering, Bioanalytics Group, Mattenstrasse 26, 4058 Basel, Switzerland |