A biresonant plasma source based on a gapped linear microwave vibrator

The operating principle of a novel microwave plasma source—a linear microwave vibrator with a gap—is discussed. The source is placed on a microwave-transparent window of a chamber filled with a plasma-forming gas (argon or methane). The device operation is based on the combination of two resonances—geometric and plasma ones. The results of experimental tests of the source are presented. For a microwave frequency of 2.45 GHz, microwave power of ≤1 kW, and plasma-forming gas pressure in the range 5 × 10⁻²–10⁻¹ Torr, the source is capable of filling the reactor volume with a plasma having an electron density of about 10¹² cm⁻³ and electron temperature of a few electronvolts.