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A Time-Dependent Model of Pulse-Modulated Dual Radio Frequency Capacitively Coupled Plasma Sheath |
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| Authors: | Hossain M. M. Jahan N. A. Rahman M. T. |
| Affiliation: | 1.Department of Electrical and Electronic Engineering, University of Liberal Arts Bangladesh, 1209, Dhaka, Bangladesh ;2.Department of Electrical and Electronic Engineering, Southeast University, 1212, Dhaka, Bangladesh ;3.Department of Electrical and Computer Engineering, University of Florida, 32611, Ginesville, FL, USA ; |
| Abstract: | Plasma Physics Reports - A time-dependent model of pulse-driven collisional inhomogeneous sheath is proposed for dual frequency (DF) capacitively coupled plasma (CCP). A pulse-modulated low... |
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