Filling the vacuum chamber of a technological system with homogeneous plasma using a stationary glow discharge

Experimental study of a glow discharge with electrostatic confinement of electrons is carried out in the vacuum chamber volume V ≈ 0.12 m³ of a technological system “Bulat-6” in argon pressure range 0.005–5 Pa. The chamber is used as a hollow cathode of the discharge with the inner surface area S ≈ 1.5 m². It is equipped with two feedthroughs, which make it possible to immerse in the discharge plasma interchangeable anodes with surface area S _a ranging from ∼0.001 to ∼0.1 m², as well as floating electrodes isolated from both the chamber and the anode. Dependences of the cathode fall U _c = 0.4−3 kV on the pressure p at a constant discharge current in the range I = 0.2−2 A proved that aperture of the electron escape out of the electrostatic trap is equal to the sum S _o = S _a + S _f of the anode surface S _a and the floating electrode surface S _f . The sum S _o defines the lower limit p _o of the pressure range, in which U _c is independent of p. At p < p _o the cathode fall U _c grows up dramatically, when the pressure decreases, and the pressure p tends to the limit p ^ex, which is in fact the discharge extinction pressure. At p ≈ p ^ex electrons emitted by the cathode and the first generation of fast electrons produced in the cathode sheath spend almost all their energy up to 3 keV on heating the anode and the floating electrode up to 600–800°C and higher. In this case the gas in the chamber is being ionized by the next generations of electrons produced in the cathode sheath, their energy being one order of magnitude lower. When S _a < (2m/M)^1/2 S, where m is the electron mass and M is the ion mass, the anode may be additionally heated by plasma electrons accelerated by the anode fall of potential U _a up to 0.5 kV.