Ionization fraction of the sputtered metal flux in a hollow cathode magnetron

Results from studies of the parameters of a novel type of plasma source—a hollow cathode magnetron—are presented. The magnetron operates at a gas pressure of 5–20 mTorr, the discharge power being in the range of 0.5–4 kW. At discharge powers exceeding 2 kW, a plasma flow with a density of higher than 10¹¹ cm^?3 and length of up to 30 cm forms at the magnetron output. Using a grid quartz crystal microbalance, the ionized copper flux fraction was measured as a function of the gas pressure, discharge power, and distance from the target. At gas pressures of higher than 15 mTorr, the degree of ionization at a distance of 31 cm exceeds 50%.