Study of the plasma parameters in a high-current pulsed magnetron sputtering system

Results are presented from experimental studies of the current-voltage characteristics and spatial and temporal parameters of the plasma in a high-current pulsed magnetron sputtering system with a 10-cm-diameter plane disk cathode. It is shown that the plasma density in such a system is three orders of magnitude higher than that in conventional dc magnetron discharges and reaches 10¹³ cm⁻³ at a distance of 250 mm from the cathode at a peak discharge current of 500 A. The plasma propagates from the cathode region at a velocity of 1 cm/μs in the axial direction and 0.25 cm/μs in the radial direction. Optical emission spectroscopy shows that the degree of plasma ionization increases severalfold with increasing discharge current, mainly at the expense of the sputtered material.     

Self-consistent electron and ion flows in a fast Z-pinch

Results are presented from experimental studies of fast Z-pinches produced in plasmas of high-Z elements. An analysis of a plasma structure emitting X radiation and time-resolved measurements of the electron emission showed that a self-consistent regime of electron and ion motion is established in the plasma channel of the discharge. It was found that, in this regime, the electron component makes a negative contribution to the net current and an electrically neutral supersonic plasma flow propagates along the discharge axis in the direction of the net current.     

Structures of the plasma channels in a Besselian beam

A mechanism for the formation of the structure of an optical discharge in Besselian laser beams is proposed on the basis of analyzing numerous experiments. The discharge structure is determined by the periodicity of the field of a Besselian beam in the radial and longitudinal directions and also depends on the power and duration of the heating pulse. In the initial stage of the plasma channel formation, the configuration of the channel inhomogeneities follows the discharge structure. If the spatial scale of the discharge structure is small, then the developing channel evolves into a homogeneous state. The time required for the structural inhomogeneities of the plasma channel to be smoothed out is estimated as a function of their scale length. __________ Translated from Fizika Plazmy, Vol. 27, No. 9, 2001, pp. 846–858. Original Russian Text Copyright ￠ 2001 by Pyatnitsky.     

Double layer in a cylindrical hollow-cathode discharge

A dc cylindrical coaxial glow discharge with an inner grid anode has been studied. The region between the two electrodes is seen dark, while a brightly glowing region forms inside the grid anode up to the center. The current-voltage characteristic of a dc cylindrical glow discharge in nitrogen is similar to that of a normal glow discharge, while the normal glow discharge voltage decreases with increasing pressure. The minimum plasma potentials are observed in the hollow cathode region due to the accumulation of electrons at the back of the grid anode. At the center, some of the passed electrons are converged, so their potential is decreased. These electrons have a sufficient time to be redistributed to form one group with a Maxwellian electron energy distribution function. The electron temperature measured by electric probes varies from 1.6 to 3.6 eV, while the plasma density varies from 3.9 × 10¹⁶ to 7 × 10¹³ m⁻³, depending on the discharge current and probe position. The plasma density increases as the electrons move radially from the grid toward the central region, while their temperature decreases.     

Generation of plasma inhomogeneities and their total suppression in a volume self-sustained discharge

The principle types of inhomogeneities formed in a volume self-sustained discharge are analyzed. Possible mechanisms and conditions for suppression of their development are considered. An ultimately homogeneous volume self-sustained discharge in CO₂: N₂: He mixtures where local plasma inhomogeneities are absent is obtained. At the energy contribution of 170 J/l, the duration of steady discharge burning in the CO₂: N₂: He = 1: 2: 3 mixtures at atmospheric pressure is 10 μs.     

Stimulated ionization scattering of a wave beam forming a discharge channel in a magnetic mirror trap

The stimulated scattering of a whistler wave beam forming an extended discharge channel in a magnetic mirror trap is discovered and investigated experimentally. It is shown that the beam is scattered by relaxaction oscillations of the lattice of plasma inhomogeneities excited by the beam field. The spectrum of the pump field in the RF discharge plasma is found to broaden considerably and to contain individual modulation peaks corresponding to lattice oscillations. The peaks are observed at working gas pressures at which the electron mean free path is close to the wavelength of the standing wave forming the discharge channel. A physical model describing the phenomena observed is developed.     

Runaway electron beams in the gas discharge for UV nitrogen laser excitation

The review of the methods for obtaining the runaway electron beams in the gas discharge is performed. The new method is offered, using which the beam is first formed in a narrow gap (∼1 mm) between the cathode and the grid and then it is accelerated by the field of the plasma column of the anomalous self-sustained discharge in the main gap (10–20 mm long). The electron beams with an energy of about 10 keV and current density of 10³ A/cm² at a molecular nitrogen pressure of up to 100 Torr have been obtained experimentally. The results of research of the UV nitrogen laser with an excitation via runaway electron beam and radiation of energy of ∼1 mJ are given. The UV nitrogen laser generation with the energy of ∼1 mJ has been obtained by the runaway electron beams.     

Simulations of a surface glow discharge in a supersonic gas flow in the presence of external ionization

Results of two-dimensional hydrodynamic simulations of a surface glow discharge operating at pressures of 0.2–0.5 Torr in a nitrogen flow propagating with a velocity of 1000 m/s in the presence of external ionization are presented. The effect of the external ionization rate on discharge operation is analyzed. The current-voltage characteristics of the discharge are calculated for different intensities of external ionization in both the presence and absence of secondary electron emission from the cathode. The discharge structure and plasma parameters in the vicinity of the loaded electrode are considered. It is shown that, when the discharge operates at the expense of secondary emission from the cathode, the discharge current and cathode sheath configuration are insensitive to external ionization. It is also demonstrated that, even at a high rate of external ionization, the discharge operates due to secondary emission from the cathode.     

Plasma decay in the afterglow of a high-voltage nanosecond discharge in air

The decay of air plasma produced by a high-voltage nanosecond discharge at room temperature and gas pressures in the range of 1–10 Torr was studied experimentally and theoretically. The time dependence of the electron density was measured with a microwave interferometer. The initial electron density was about 10¹² cm⁻³. The discharge homogeneity was monitored using optical methods. The dynamics of the charged particle densities in the discharge afterglow was simulated by numerically solving the balance equations for electron and ions and the equation for the electron temperature. It was shown that, under these experimental conditions, plasma electrons are mainly lost due to dissociative and three-body recombination with ions. Agreement between the measured and calculated electron densities was achieved only when the rate constant of the three-body electron-ion recombination was increased by one order of magnitude and the temperature dependence of this rate constant was modified. This indicates that the mechanism for three-body recombination of molecular ions differs from that of the well-studied mechanism of atomic ion recombination.     

Kinetic theory of the positive column of a low-pressure discharge in a transverse magnetic field

The influence of a transverse magnetic field on the characteristics of the positive column of a planar low-pressure discharge is studied theoretically. The motion of magnetized electrons is described in the framework of a continuous-medium model, while the ion motion in the ambipolar electric field is described by means of a kinetic equation. Using mathematical transformations, the problem is reduced to a secondorder ordinary differential equation, from which the spatial distribution of the potential is found in an analytic form. The spatial distributions of the plasma density, mean plasma velocity, and electric potential are calculated, the ion velocity distribution function at the plasma boundary is found, and the electron energy as a function of the magnetic field is determined. It is shown that, as the magnetic field rises, the electron energy increases, the distributions of the plasma density and mean plasma velocity become asymmetric, the maximum of the plasma density is displaced in the direction of the Ampère force, and the ion flux in this direction becomes substantially larger than the counter-directed ion flux.     

Stratification and filamentation mechanism for a multicharged plasma of a Z-pinch

The thermal-ionizational instability that gives rise to axial and azimuthal inhomogeneities in the electron temperature and electron density in the form of striations and filaments in a multicharged plasma of a Z-pinch is studied in the linear approximation. The theoretical results on the rate at which the inhomogeneities grow and their characteristic spatial dimension agree with the experimental data.     

Measurements and calculations of the electron distribution function in the electronegative plasma of a hollow-cathode discharge in N<Subscript>2</Subscript>: SF<Subscript>6</Subscript> mixtures

Results are presented from measurements and numerical calculations of the electron energy distribution function in the plasma of a hollow-cathode glow discharge in N₂: SF₆ mixtures. It is shown that, when a small amount of SF₆ is added to nitrogen, the number of electrons in the inverse region of the distribution function (2–6 eV) increases by about one order of magnitude. As the electric field in plasma increases to ≈0.5 V/cm, the dip in the distribution function disappears and the inversion region vanishes.     

Channeling of high-power radio waves under conditions of strong anomalous absorption in the presence of an averaged electron heating source

Strong anomalous absorption of a high-power radio wave by small-scale plasma inhomogeneities in the Earth’s ionosphere can lead to the formation of self-consistent channels (solitons) in which the wave propagates along the magnetic field, but has a soliton-like intensity distribution across the field. The structure of a cylindrical soliton as a function of the wave intensity at the soliton axis is analyzed. Averaged density perturbations leading to wave focusing were calculated using the model proposed earlier by Vas’kov and Gurevich (Geomagn. Aéron. 16, 1112 (1976)), in which an averaged electron heating source was used. It is shown that, under conditions of strong electron recombination, the radii of individual solitons do not exceed 650 m.     

Energy efficiency of electron plasma emitters

Electron emission influence from gas-discharge plasma on plasma emitter energy parameters is considered. It is shown, that electron emission from plasma is accompanied by energy contribution redistribution in the gas-discharge from plasma emitter supplies sources—the gas-discharge power supply and the accelerating voltage power supply. Some modes of electron emission as a result can be realized: “a probe measurements mode,” “a transitive mode,” and “a full switching mode.”     

Charging of submicron structures during silicon dioxide etching in one- and two-frequency gas discharges

A model that combines the Monte Carlo method for calculating electron and ion trajectories in three-dimensional geometry and an analytic approach developed for calculating an electric field in two-dimensional geometry is used to simulate the charging of the surface of periodic submicron SiO₂ structures by electron and ion fluxes in the plasma of a one- and a two-frequency capacitive RF discharge. The energy distribution function of the electrons and ions that come to the bottom of a submicron structure in an argon and an argon-containing plasma is calculated for structures with a width of 11–45 nm and an aspect ratio of d/w = 1–10 (where d and w are the depth and width of the structure). It is shown that secondary electronelectron emission plays an important role in the redistribution of the electric charge and, accordingly, of the electric potential in a submicron structure. It is demonstrated that, when the secondary electron-electron emission mechanism is taken into account, the ion energy spectrum at the bottom of a submicron structure is shifted toward lower energies and becomes broader in comparison with the spectrum of an ion flux from an RF discharge plasma. Moreover, the shift and broadening depend only on the secondary electron-electron emission coefficient, the energy of the charged particles, and the aspect ratio.     

Nonquasineutral current equilibria as elementary structures of plasma dynamics

A study is made of the fundamental features of current filaments with a nonzero electron vorticity Ω _e ≡ B − (c/e) ▿ × p _ee ≠ 0 and the corresponding Lagrangian invariant I _e . Such current structures can exist on spatial scales of up to ω _pi ⁻¹. It is shown that the dissipative stage of the plasma evolution and the violation of Thomson’s theorem on vorticity conservation in an electron fluid are of fundamental importance for the onset of electron current structures. A key role of the screening of electric and magnetic fields at distances on the order of the magnetic Debye radius r _B = B/(4πen _e )—the main property of such current structures in a Hall medium with σB/(en _e c) ≫ 1—is stressed. Since the minimum size of a vortex structure is the London length c/ω _pe , the structures under consideration correspond to the condition r _B > c/ω _pe or B ² > 4πn _e m _e c ², which leads to strong charge separation in the filament and relativistic electron drift. It is demonstrated that the specific energy content in current structures is high at a filament current of 10–15 kA: from 100 J/cm³ at a plasma density of 10¹⁴ cm⁻³ (the parameters of a lightning leader) to 10⁷ J/cm³ for a fully ionized atmospheric-pressure air. Estimates are presented showing that the Earth’s ionosphere, circumsolar space, and interstellar space are all Hall media in which current vortex structures can occur. A localized cylindrical equilibrium with a magnetic field reversal is constructed—an equilibrium that correlates with the magnetic structures observed in intergalactic space. It is shown that a magnetized plasma can be studied by using evolutionary equations for the electron and ion Lagrangian invariants I _e and I _i . An investigation is carried out of the evolution of a current-carrying plasma in a cylinder with a strong external magnetic field and with a longitudinal electron current turned on in the initial stage—an object that can serve as the simplest electrodynamic model of a tokamak. In this case, it is assumed that the plasma conductivity is low in the initial stage and then increases substantially with time. Based on the conservation of the integral momentum of the charged particles and electromagnetic field in a plasma cylinder within a perfectly conducting wall impenetrable by particles, arguments are presented in support of the generation of a radial electric field in a plasma cylinder and the production of drift ion fluxes along the cylinder axis. A hypothesis is proposed that the ionized intergalactic gas expands under the action of electromagnetic forces.     

Picosecond runaway electron beams in air

Experimental data on the generation of picosecond runaway electron beams in an air gap with an inhomogeneous electric field at a cathode voltage of up to 500 kV are presented. The methods and equipment developed for these experiments made it possible to measure the beam characteristics with a time resolution of better than 10⁻¹¹ s, determine the voltage range and the beam formation time in the breakdown delay stage, and demonstrate the influence of the state of the cathode surface on the stability of runaway electron generation. It is demonstrated that the critical electron runaway field in air agrees with the classical concepts and that the accelerated beam can be compressed to ∼20 ps. It is unlikely that, under these conditions, the beam duration is limited due to the transition of field emission from the cathode to a microexplosion of inhomogeneities. The maximum energy acquired by runaway electrons in the course of acceleration does not exceed the value corresponding to the electrode voltage.     

Anodization of aluminum and silicon in plasma of a non-self-sustained glow discharge

The results of anodization of aluminum and silicon in an oxygen plasma are presented. The plasma was generated by a non-self-sustained glow discharge with a hollow cathode excited by an electron beam at the oxygen pressure of 20 Pa. The density of the current flowing through the anodized specimen did not exceed 1.5 mA/cm², and its temperature was 200–250°C. Continuous Al₂O₃ and SiO₂ films were formed on the aluminum and silicon surfaces. The growth rate of the oxide layers was 150–200 nm/h for Al₂O₃ and 400–800 nm/h for SiO₂.     

Charging of dust grains in a nonequilibrium plasma of a stratified glow discharge

A theoretical model is presented that describes the charging of dust grains in the positive plasma column of a stratified glow dc discharge in argon. A one-dimensional self-consistent model is used to obtain axial profiles of the electric field, as well as the electron energy distribution function along the axis of the discharge tube. Radial profiles of the electric field are determined in the ambipolar diffusion approximation. It is assumed that, in the radial direction, the electron distribution function depends only on the total electron energy. Two-dimensional distributions of the discharge plasma parameters are calculated and used to determine the potential and charge of a test dust grain at a certain point within the discharge and the electrostatic forces acting on it. It is shown that the grain charge distribution depends strongly on the nonequilibrium electron distribution function and on the nonuniform distribution of the electric field in a stratified glow discharge. A discussion is presented on the suspension of dust grains, the separation of grains by size in the discharge striations, and a possible mechanism for the onset of vortex dust motion at the edge of a dust cloud.