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1.
Results from studies of a low-current glow discharge with a hollow cathode are presented. A specific feature of the discharge conditions was that a highly emissive tablet containing cesium carbonate was placed in the cathode cavity. In the absence of a tablet, the discharge ignition voltage was typically ≥3.5 kV, while the burning voltage was in the range of 500–600 V. The use of the tablet made it possible to decrease the ignition voltage to 280 V and maintain the discharge burning voltage at a level of about 130 V. A model of the current sustainment in a hollow-cathode discharge is proposed. Instead of the conventional secondary emission yield, the model uses a generalized emission yield that takes into account not only ion bombardment of the cathode, but also the emission current from an external source. The model is used to interpret the observed current?voltage characteristics. The results of calculations agree well with the experimental data. It is shown that, in some discharge modes, the external emission current from the cathode can reach 25% of the total discharge current.  相似文献   

2.
Results are presented from experimental studies of the current-voltage characteristics and spatial and temporal parameters of the plasma in a high-current pulsed magnetron sputtering system with a 10-cm-diameter plane disk cathode. It is shown that the plasma density in such a system is three orders of magnitude higher than that in conventional dc magnetron discharges and reaches 1013 cm−3 at a distance of 250 mm from the cathode at a peak discharge current of 500 A. The plasma propagates from the cathode region at a velocity of 1 cm/μs in the axial direction and 0.25 cm/μs in the radial direction. Optical emission spectroscopy shows that the degree of plasma ionization increases severalfold with increasing discharge current, mainly at the expense of the sputtered material.  相似文献   

3.
Numerical simulations of a negative corona in air demonstrate that the experimentally observed regime of self-oscillations, known as Trichel pulses, is well described by a three-dimensional axisymmetric model that is based on the standard transport equations and in which only the ion-induced secondary electron emission at the cathode is taken into account. The quantitative difference between the measured and calculated values of the mean current and the pulse repetition rate most likely stems from the insufficiently large dimensions of the computation region and from the fact that the point shape adopted in simulations somewhat inexactly conforms to that used in experiments. It was found that the transverse discharge structure near the cathode radically changes during the pulse. Specifically, as the current grows, a cathode sheath forms at the discharge axis and expands over the cathode surface. When the current falls off, the cathode sheath is rapidly destroyed; as a result, the characteristic field structure is well defined only near the discharge axis and becomes virtually indistinguishable as the current decreases by an order of magnitude.  相似文献   

4.
As was shown earlier for pulsed discharges that occur in electric fields rising with extremely high rates (1018 V/(cm s)) during the pulse rise time, the electron current in a vacuum discharge is lower than the current of runaway electrons in an atmospheric air discharge in a 1-cm-long gap. In this paper, this is explained by that the field emission current from cathode microprotrusions in a gas discharge is enhanced due to gas ionization. This hastens the initiation of explosive electron emission, which occurs within 10–11 s at a current density of up to 1010 A/cm2. Thereafter, a first-type cathode spot starts forming. The temperature of the cathode spot decreases due to heat conduction, and the explosive emission current ceases. Thus, the runaway electron current pulse is similar in nature to the ecton phenomenon in a vacuum discharge.  相似文献   

5.
The excitation of oscillations in a discharge with negative differential conductivity is studied experimentally. The possibility is demonstrated of amplifying oscillations in the cathode dark space at frequencies close to the electron plasma frequency of the positive-column plasma. The phase velocities of waves at these frequencies are determined. When the waves pass from the cathode dark space to the discharge positive column, their phase velocities decrease; the closer the frequency is to the electron plasma frequency, the more pronounced the decrease in the phase velocity. As the intensity of oscillations increases, the discharge becomes non-steady-state. This is confirmed by the time evolution of the current-voltage characteristic. The shape of the current-voltage characteristic, its splitting, and the rate at which it varies depend on the input RF power. The decrease in the cathode dark space indicates that the ionization processes in the discharge are strongly influenced by electron plasma oscillations excited due to the collective interaction of the electron beam formed at the cathode with the discharge plasma. It is these processes that determine the maximum values of both the frequency of the excited oscillations and the power that can be withdrawn from the discharge.  相似文献   

6.
Results from studies of the parameters of a novel type of plasma source—a hollow cathode magnetron—are presented. The magnetron operates at a gas pressure of 5–20 mTorr, the discharge power being in the range of 0.5–4 kW. At discharge powers exceeding 2 kW, a plasma flow with a density of higher than 1011 cm?3 and length of up to 30 cm forms at the magnetron output. Using a grid quartz crystal microbalance, the ionized copper flux fraction was measured as a function of the gas pressure, discharge power, and distance from the target. At gas pressures of higher than 15 mTorr, the degree of ionization at a distance of 31 cm exceeds 50%.  相似文献   

7.
The characteristics of the initial stage of the formation of the positive column of a glow discharge in nitrogen at reduced pressures are studied experimentally and numerically. A dip in the plasma emission intensity in the initial stage of the discharge (the so-called “dark phase”) is observed experimentally at the positive polarity of the high-voltage electrode (the cathode is grounded). The dark phase is preceded by an ionization wave (IW). When the anode is grounded, neither an IW nor a dip in the discharge emission intensity are observed. A theoretical model capable of describing the discharge development under the actual experimental conditions is constructed. It is shown that the dark phase effect may be caused by the high electron density (above the steady-state one) produced in the gas during the passage of the IW across the discharge gap. This mechanism of the dark phase formation differs from the mechanism proposed earlier to explain a similar effect in noble gases. Additional experiments carried out with pure argon, helium, and helium with a nitrogen admixture have shown that, in the case of a grounded cathode, gas breakdown is also accompanied by the passage of an IW, whereas in the case of a grounded anode, no IW is observed; however, the dark phase is present in both cases. It is shown using computer simulations that, in nitrogen (in contrast to noble gases), the mechanism resulting in the dark phase effect does not operate in the absence of an IW.  相似文献   

8.
Self-sustained glow discharge with a hollow cathode was studied at high discharge currents (up to 30 A). Using a grid analyzer placed on the side flange of the hollow cathode, the ion and electron currents flowing in the cathode sheath were measured. At a discharge current of 30 A, pressure of 0.2?C2 Pa, and plasma density of 1011 cm?3, the coefficient of secondary ion-electron emission ?? calculated from the experimental data is found to be 0.1?C0.15. The dependences of the plasma parameters on the area of the small anode placed inside the larger hollow cathode are determined.  相似文献   

9.
Breakdown dynamics in the course of glow discharge ignition in a long discharge tube (80 cm in length and 25 mm in diameter) filled with argon at a pressure of 3–4 Torr and mercury vapor at room temperature was studied experimentally. Rectangular voltage pulses with amplitudes from 1 to 2.5 kV were applied to the tube anode, the cathode being grounded. Complex electrical and optical measurements of the breakdown dynamics were carried out. Breakdown begins with a primary discharge between the anode and the tube wall. In this stage, a jump in the anode current and a sharp decrease in the anode voltage are observed and prebreakdown ionization wave arises near the anode. The cathode current appears only after the ionization wave reaches the cathode. The wave propagation velocity was measured at different points along the tube axis. The wave emission spectrum contains Hg, Ar, and Ar+ lines. The intensities of these lines measured at a fixed point exhibit very different time behaviors. The effect of the tube shielding on the breakdown characteristics was examined. It is found that, at a sufficiently narrow gap between the shield and the tube, this effect can be substantial.  相似文献   

10.
The characteristics of a dc discharge excited between a metal anode and a water cathode in argon were studied experimentally. The dimensions of the positive column and the electric field in it were measured, and the vibrational temperature in the positive column was determined from the N2 C 3ΠuB 3Πg (0–2) emission band. It is shown that the power deposited in the positive column is almost entirely spent on gas heating. The obtained dependence of the reduced electric field on the gas pressure and the ionization frequencies calculated by solving the Boltzmann equation indicate that electrons are lost diffusively, whereas ionization proceeds in a stepwise manner via the lower metastable states of argon atoms.  相似文献   

11.
Results are presented from experimental investigations of the dynamics of optical emission from a nanosecond diffuse discharge in a rod-plane electrode system. A study was made of discharges in a 10-cm-long interelectrode gap in atmospheric-pressure air (the cathode being a 1-cm-diameter rod with a bullet-shaped end). The voltage across the discharge gap was 220 kV and the voltage pulse duration was 180 ns, the voltage rise time being 10 ns. In experiments, the discharges were observed to evolve through two stages: the bridging stage and the conduction stage. The bridging stage begins with intense optical emission from the cathode region, the onset of the emission being delayed with respect to the beginning of the voltage pulse. Simultaneously with the onset of optical emission, a displacement current corresponding to the motion of charged particles begins to be generated in the cathode region. The duration of this current corresponds to the time the emission front takes to bridge the gap. As the emission front reaches the anode region, the current increases abruptly, indicating the beginning of the conduction stage. It was found that the time delay of optical emission relative to the beginning of the voltage pulse largely governs the discharge parameters: as the time delay becomes longer, the emission front velocity in the bridging stage increases from 0.6 to 1.5 cm/ns, the probability of realizing a multichannel structure of the discharge becomes higher, and the discharge current and the intensity of X-ray emission from the discharge grow.  相似文献   

12.
Investigations of high-voltage open discharge in helium have shown a possibility of generation of current pulses with subnanosecond front rise, due to ultra-fast breakdown development. The open discharge is ignited between two planar cathodes with mesh anode in the middle between them. For gas pressure 6 Torr and 20 kV applied voltage, the rate of current rise reaches 500 A/(cm2 ns) for current density 200 A/cm2 and more. The time of breakdown development was measured for different helium pressures and a kinetic model of breakdown in open discharge is presented, based on elementary reactions for electrons, ions and fast atoms. The model also includes various cathode emission processes due to cathode bombardment by ions, fast atoms, electrons and photons of resonant radiation with Doppler shift of frequency. It is shown, that the dominating emission processes depend on the evolution of the discharge voltage during the breakdown. In the simulations, two cases of voltage behavior were considered: (i) the voltage is kept constant during the breakdown; (ii) the voltage is reduced with the growth of current. For the first case, the exponentially growing current is maintained due to photoemission by the resonant photons with Doppler-shifted frequency. For the second case, the dominating factor of current growth is the secondary electron emission. In both cases, the subnanosecond rise of discharge current was obtained. Also the effect of gas pressure on breakdown development was considered. It was found that for 20 Torr gas pressure the time of current rise decreases to 0.1 ns, which is in agreement with experimental data.  相似文献   

13.
The interaction of a plasma in the accelerating gap of an open discharge with a strong external electric field and with the cathode surface has been investigated theoretically and experimentally. In a pulsed nanosecond discharge, the ion inertia and plasma screening of the electric field cause a fast growth of the electric field E in the cathode region and a decrease in the length of the latter. Along with a reduction of the electron multiplication factor at high electric fields, this leads to a substantial decrease in the ion flux toward the cathode, which allows one to develop highly efficient open-discharge light sources with a long lifetime and low cathode sputtering. In this respect, continuous and quasi-continuous discharges are less advantageous because of the smaller increase in the electric field in the cathode region. The Townsend coefficients of charge multiplication and electron emission at high electric fields typical of open discharges have been measured for the first time. Fast ions and atoms extracted from the plasma of the accelerating gap significantly affect the cathode emission properties. In particular, photoemission is enhanced by more than one order of magnitude and becomes the main mechanism for electron generation. This also increases the efficiency and lifetime of open-discharge light sources.  相似文献   

14.
The features are studied of plasma production in the initial stage of implosion of hollow cylindrical wire arrays at electric-field growth rates of 1012 V/(cm s). The results are presented from the analysis of both UV emission from the wire plasma and the discharge parameters in the initial stage of the formation of a Z-pinch discharge. It is found that, a few nanoseconds after applying voltage to a tungsten wire array, a plasma shell arises on the wire surface and the array becomes a heterogeneous system consisting of metal wire cores and a plasma surrounding each wire (a plasma corona). As a result, the current switches from the wires to the plasma. A further heating and ionization of the wire material are due primarily to heat transfer from the plasma corona. A model describing the primary breakdown along the wires is created with allowance for the presence of low-Z impurities on the wire surface.  相似文献   

15.
Results are presented from experimental studies of the conversion of a steady-state negative corona into a spark. It is found that a spark in a negative corona in nitrogen and air is formed in the absence of fast primary streamers. It is shown that, in atmospheric-pressure nitrogen, the conversion of a corona into a spark begins with the propagation of a plasma channel (secondary streamer) from the point electrode (cathode) to the plane electrode (anode). In contrast, the plasma channel in air originates near the plane electrode and then propagates towards the point electrode. The propagation velocity of the secondary streamer is very low, V=103–104 cm/s. Two possible scenarios of the formation of the spark channel in a negative corona in nitrogen are described on the basis of the concept of a contracted volume glow discharge. Results are presented from time-resolved spectral measurements of plasma emission from different regions of the corona during its transformation into a spark.  相似文献   

16.
The initiation and characteristics of a low-pressure glow discharge in air in large-diameter discharge tubes are studied. A deviation from the Paschen law is observed: the breakdown curves U dc(pL) shift toward the higher values of U dc and pL as the interelectrode distance L increases. It is shown that the normal regime of a glow discharge is accompanied by gas ionization in the anode sheath. This takes place only for pL values lying to the right of the inflection point in the breakdown curve. The cathode-sheath characteristics in the normal and abnormal regimes of an air discharge for a duralumin cathode are determined. The axial profiles of the ion density, electron temperature, and plasma potential, as well as the anode voltage drop, are measured at various air pressures.  相似文献   

17.
The formation times of self-sustained subnanosecond discharges in nitrogen at pressures of 1?40 atm and in hydrogen at pressures of 1–60 atm are analyzed in terms of the avalanche model. In experiments, a subnanosecond voltage pulse with an amplitude of 102 ± 2 kV was applied to a 0.5-mm-long discharge gap with a uniformly distributed electric field (the curvature radii of both the cathode and anode ends were 1 cm). The rise time of the voltage pulse from 0.1 to 0.9 of its amplitude value was about 250 ps. Breakdown occurred at the leading edge of the pulse. The discharge formation time was measured at different gas pressures with a step of 5–10 atm. Analysis of the experimental results shows that, in nitrogen at pressures of 10–40 atm and in hydrogen at pressures of 20–50 atm, breakdown occurs earlier than the electron avalanche reaches its critical length and that the critical avalanche length lies in the range of (2–8) × 10–2 mm, which is one order of magnitude shorter than the discharge gap length. This means that the avalanche–streamer model is inapplicable in this case. The fast formation of a conducting channel under these conditions can be explained by ionization of gas by runaway electrons. In this case, the conducting column develops as a result of simultaneous development of a large number of electron avalanches in the gas volume. An increase in the hydrogen pressure from 50 to 60 atm leads to an abrupt increase in the discharge formation time by about 50%. As a result, the growth time of the electron avalanche to its critical length becomes shorter than the discharge formation time. In this case, the electrons cease to pass into the runaway regime and the discharge is initiated from the cathode due to field emission from microinhomogeneities on its surface. Under these conditions, the discharge formation time is well described by the avalanche–streamer model.  相似文献   

18.
Results are presented from experimental studies of discharge instabilities and the energy and temporal characteristics of a vacuum-diode X-ray source with a laser plasma cathode over a wide range of energies, intensities, and durations of the plasma-forming laser pulse. It is experimentally shown that the vacuum-discharge dynamics and radiation processes in different discharge stages substantially depend on the parameters of the laser radiation. The shortest recorded pulse duration (10 ns) of Ti K-line radiation (4.5 keV) with a total photon number of 1011 is achieved when the laser plasma cathode is produced by a laser pulse with a duration of 27 ps and an intensity of 1013 W/cm2. It is found that the contrast of characteristic emission against the bremsstrahlung background is maximum when discharge instabilities are suppressed and the accelerating voltage is three to four times higher than the threshold voltage for line excitation.  相似文献   

19.
The spatial, electrical, and optical characteristics of a transverse glow discharge and a volume discharge with a spherical anode and plane cathode in low-pressure Xe/Cl2 mixtures are studied. It is shown that the transverse glow discharge in mixtures with a low chlorine content occupies most of the interelectrode gap and exists in the form of strata. As the total pressure (P≥300 Pa) and the partial chlorine pressure (P(Cl2)≥80 Pa) increase, a solitary plasma domain with a volume of 1–2 cm3 forms in the discharge gap. It acts as a selective source of UV radiation in the XeCl(D-X) 236-nm, Cl2 (D′-A′) 257-nm, and XeCl(B-X) 308-nm bands. In certain Xe/Cl2 mixtures, plasma self-oscillations in the frequency range 1–100 kHz are observed. The current of a low-pressure volume discharge with a spherical anode and plane cathode and the emission from it have both a dc and an ac component. The pressure and composition of the working mixture, as well as the average current of the volume discharge are optimized to attain the maximum emission intensity of the XeCl(D,B-X) bands. Low-pressure volume discharges in xenon/chlorine mixtures can be used as active media in low-pressure large-aperture planar or cylindrical excimer-halogen lamps emitting modulated or repetitive pulsed UV radiation.  相似文献   

20.
An elementary theory of the cathode region at the high-voltage stage of an arc discharge is proposed. The theory is based on the balance equations for the particles in an active plasma layer, the power balance at the cathode, and the equation for the Richardson-Dushman electron emission with allowance for the Schottky effect. The most characteristic features of this type of discharge are considered. A non-Langmuir cathode sheath model is proposed for a low-voltage arc on a tungsten electrode.  相似文献   

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