Characteristic properties of the frame-antenna-produced RF discharge evolution in the Uragan-3M torsatron

In the ? = 3 Uragan-3M torsatron, hydrogen plasma is produced and heated by RF fields in the Alfvén range of frequencies (ω ? ω _ci ). To this end, a frame antenna with a broad spectrum of generated parallel wavenumbers is used. The RF discharge evolution is studied experimentally at different values of the RF power fed to the antenna (the anode voltage of the oscillator and the antenna current) and the initial pressure of the fueling gas. It is shown that, depending on the antenna current and hydrogen pressure, the discharge can operate in two regimes differing in the plasma density, temperature, and particle loss. The change in the discharge regime with increasing anode voltage is steplike in character. The particular values of the anode voltage and pressure at which the change occurs are affected by RF preionization or breakdown stabilization by a microwave discharge. The obtained results will be used in future experiments to choose the optimal regimes of the frame-antenna-produced RF discharge as a target for the production and heating of a denser plasma by another, shorter wavelength three-half-turn antenna.     

Effect of an external RF field on the beam-plasma discharge in a magnetic field

The effect of an RF field on a steady-state beam-plasma discharge with a plane electrode placed parallel to a sheetlike electron beam is studied experimentally. The plasma parameters were measured by a single probe, and the electron distribution function was determined with the use of an electrostatic analyzer. The energy and current of the electron beam were E _B=2.5 keV and J _B=0.05–1.5 A, respectively. The working pressure was p=2×10^?5–10^?3 torr. The frequency of the external RF field was 13.56 MHz. Both the steady-state regimes in which the RF field had no effect on the plasma parameters and regimes with a pronounced effect of the RF field were observed. The experiments show that the regime of the discharge depends strongly on the plasma density and the magnetic field. The parametric instability is studied theoretically in the weak-turbulence approximation. It is shown that, due to the decay nature of the spectrum of plasma oscillations, the onset of instability is accompanied by the transfer of the energy of fluctuations over the spectrum, from the pump frequency toward its harmonics.     

Stimulated ionization scattering of a wave beam forming a discharge channel in a magnetic mirror trap

The stimulated scattering of a whistler wave beam forming an extended discharge channel in a magnetic mirror trap is discovered and investigated experimentally. It is shown that the beam is scattered by relaxaction oscillations of the lattice of plasma inhomogeneities excited by the beam field. The spectrum of the pump field in the RF discharge plasma is found to broaden considerably and to contain individual modulation peaks corresponding to lattice oscillations. The peaks are observed at working gas pressures at which the electron mean free path is close to the wavelength of the standing wave forming the discharge channel. A physical model describing the phenomena observed is developed.     

Low-current medium-pressure RF discharge with electron photoemission in the electrode sheath and penetration of the sheath electrons into the discharge column

A model is developed for simulating a low-current moderate-pressure RF discharge with allowance for such characteristic discharge properties as the existence of two sheaths near both electrodes throughout the RF field period; the formation of an electron cloud at the sheath boundary that periodically fills the sheath and leaves it, depending on the phase of the applied RF voltage; the production by the sheath electrons of metastable gas particles that interact with the cloud electrons during subsequent field periods, followed by the excitation of metastable states to the emitting levels; the formation of a sheath in a low-current RF discharge due to the overlap of the secondary electron avalanches triggered by electron photoemission from the electrode surface; and the conditions under which the sheath electrons penetrate into the positive column and accumulate there, which makes, thereby making a low-current RF discharge similar to a non-self-sustained discharge. The parameters of the sheath in a low-current RF discharge are determined by the conditions under which the electron photoemission current from the electrode surface in the sheath is self-sustaining and, like the parameters of the positive discharge column, depend on the sort of gas, the gas pressure, the frequency of the applied RF field, and the interelectrode distance. The results of calculating the parameters of the sheath and column of a low-current RF discharge for nitrogen and helium at different pressures, as well as for different field frequencies and interelectrode distances, are presented and are compared with the experimental data.     

Radio-frequency discharge in a molecular gas flow at a frequency of 1.76 MHz

Results are presented from experiments on the initiation of a homogeneous stable capacitive RF discharge at a frequency of 1.76 MHz in a high-speed molecular gas flow between metal electrodes at a pressure of 5 Torr or dielectric-coated electrodes at a pressure of up to 50 Torr. A mechanism of the current closure in the electrode sheaths related to the primary photoelectric current generated alternately from different electrodes is proposed. The average electron energy increases via second-kind (superelastic) collisions, and fast electrons with energies corresponding to the amplitude value of the RF voltage appear in the electron energy spectrum. As a result, primary emission arises due to the excitation of emitting states from metastable molecular levels. The primary photoelectric current initiates electron avalanches in the electrode sheaths due to secondary photoelectron emission. According to calculations, the current?voltage characteristic of the sheath in this type of discharge is ascending and the field strengths in the electrode sheath and positive column are lower than those in a self-sustained dc discharge. The calculated results are compared with the experimental data.     

Characteristics of a transverse RF discharge in Xe/Cl<Subscript>2</Subscript> mixtures

Results are presented from the study of the electrical and optical characteristics of a transverse RF discharge in Xe/Cl₂ mixtures at pressures of p≤400 Pa. The working mixture was excited by a modulated RF discharge (f=1.76 MHz) with a transverse electrode configuration (L≤17 cm). The emission spectrum in the spectral range of 210–600 nm and the waveforms of the discharge current, discharge voltage, and plasma emission intensity were investigated. The UV emission power from the discharge was studied as a function of the pressure and composition of a Xe/Cl₂ mixture. It is shown that a discharge in a xenon-chlorine mixture acts as planar excimer-halogen lamp operating in the spectral range of 220–450 nm, which contains a system of overlapping XeCl(D, B-X; B, C-A) and Cl₂(D′-A′) bands. Transverse RF discharges in Xe/Cl₂ mixtures can be used to create a wideband lamp with two 50-cm² planar apertures and the low circulation rate of the working mixture.     

Model for calculating low-current moderate-pressure RF discharges with photon-driven secondary electron photoemission from the electrode surface

A model is developed for calculating a low-current moderate-pressure RF discharge with allowance for an electron cloud that is formed by electrons produced during the preceding periods of the RF field and fills the electrode sheath at regular intervals in accordance with the phase of the RF voltage applied to the electrodes. The cloud arises due to a phase shift of π/2 between the voltage across the sheath and that across the column of a low-current RF discharge plasma. The photon generation mechanism is as follows: as the cloud electrons fill the sheath, they acquire energy in superelastic collisions with metastables produced by the sheath electrons during the preceding periods of the RF field and then excite the metastable states to emitting levels. The discharge sheath forms due to the overlap of the secondary electron avalanches triggered by electron photoemission from the electrode surface. The parameters of the sheath in a low-current RF discharge are determined by the conditions under which the electron photoemission current in the sheath is self-sustaining, but the capacitive susceptance of the sheath is substantially higher than its active electrical conductance. The results of calculations are compared with the experimental data.     

Properties of a low-pressure inductive RF discharge II: Mathematical simulations

Self-consistent numerical simulations of a low-pressure inductive RF discharge have been carried out. It is shown that, on the one hand, the plasma parameters are determined by the RF power absorbed in the plasma and, on the other, they themselves govern the power absorption. This results in a nonmonotonic dependence of the plasma parameters on the magnetic field, as well as in discharge disruptions, similar to those observed experimentally in such discharges. An inductive RF discharge with a capacitive component is simulated. The experimentally observed characteristic properties of the discharges are explained based on the regular features of the absorption of RF power in the plasma. Traditional inductive plasma sources (both without and with a magnetic field) are considered.     

Charging of submicron structures during silicon dioxide etching in one- and two-frequency gas discharges

A model that combines the Monte Carlo method for calculating electron and ion trajectories in three-dimensional geometry and an analytic approach developed for calculating an electric field in two-dimensional geometry is used to simulate the charging of the surface of periodic submicron SiO₂ structures by electron and ion fluxes in the plasma of a one- and a two-frequency capacitive RF discharge. The energy distribution function of the electrons and ions that come to the bottom of a submicron structure in an argon and an argon-containing plasma is calculated for structures with a width of 11–45 nm and an aspect ratio of d/w = 1–10 (where d and w are the depth and width of the structure). It is shown that secondary electronelectron emission plays an important role in the redistribution of the electric charge and, accordingly, of the electric potential in a submicron structure. It is demonstrated that, when the secondary electron-electron emission mechanism is taken into account, the ion energy spectrum at the bottom of a submicron structure is shifted toward lower energies and becomes broader in comparison with the spectrum of an ion flux from an RF discharge plasma. Moreover, the shift and broadening depend only on the secondary electron-electron emission coefficient, the energy of the charged particles, and the aspect ratio.     

Effect of the vibrational excitation of CO molecules on the parameters of an RF discharge

A one-dimensional model of an RF discharge in CO-containing gas mixtures is developed. The model takes into account the effect of the degree of vibrational excitation of CO molecules on the structure of the discharge and on its parameters. Experimental data are presented from measurements of the voltage-power characteristics of RF discharges in gas mixtures with different CO contents in the pressure range of 10–100 torr. The model developed is used to calculate the dependence of the root-mean-square discharge voltage on the specific power deposition in an RF discharge under our experimental conditions. The experimental data are compared to the results of numerical simulations. For working gas pressures of about 100 torr, which are typical of the operation of slab CO lasers, the calculated voltage-power characteristics of an RF discharge agree satisfactorily with those obtained experimentally. The theoretical model predicts that the vibrational excitation of CO molecules leads to a redistribution of the RF field in the discharge gap and to an increase in the laser efficiency.     

Low-current moderate-pressure RF discharge with secondary electron photoemission

A model is proposed for a low-current RF discharge with secondary electron photoemission from the electrode surface caused by photons originating in the electrode sheath. The low-current state of RF discharges at moderate pressures is peculiar in that the electrons and ions produced during the preceding periods of the RF field promote the development of the discharge during subsequent periods. Since the ion space charge is induced during many periods of the RF field, even comparatively moderate fields in the electrode sheath are sufficient to ensure the conditions under which the current is self-sustaining, in which case the electron photoemission dominates over the remaining secondary processes at the electrode surface. In a low-current RF discharge, the ion-electron emission has essentially no impact on the formation of the electrode sheath because the half-period of the RF field is much shorter than the ion transit time through the sheath. The sheath results from the overlap of the secondary electron avalanches triggered by electron photoemission from the electrode surface. The sheath parameters are determined by the conditions under which the current in the sheath is selfsustaining due to the secondary electron photoemission from the electrode surface. The capacitive susceptance of the electrode sheath is substantially higher than its electrical conductance. Low-current RF discharges can only exist when the time required for the ions to drift through the sheath and reach the electrode is much longer than the half-period of the RF field.     

Effect of Resonant Radiation Transport on the Parameters of RF and DC Discharges in a He-Ar-Xe Mixture

A study is made of the effect of the transport of Xe 147-nm resonant radiation on the parameters of a low-temperature plasma of DC and RF discharges in gas mixtures used as the working medium in lasers based on infrared transitions in xenon. RF discharges are treated in the planar geometry typical of slab lasers. DC discharges in tubes are treated in cylindrical geometry. The trapping of resonant radiation is described using different approximate models: the decay time approximation for a plasma slab (the Holstein approximation) and the effective lifetime approximation (the Biberman approximation). The transport equation for resonant radiation is solved numerically. The effect of the radiation transport on both the current-voltage characteristics of a discharge and the spatial distribution of the excited Xe atoms is investigated. The current-voltage characteristics calculated for a DC discharge with allowance for the resonant radiation transport agree well with the experimental characteristics. It is found that, for an RF discharge, the effective lifetime approximation overestimates the density of the excited Xe atoms near the electrodes by several times and underestimates this density at the midplane of the discharge gap.     

Retention of helical structure of pBR322 covalently closed circular duplex DNA at high alkaline pH

Denaturation of covalently closed circular duplex replicative form (RF) I at high pH yields a form with high sedimentation coefficient even after neutralization. This form allowed less ethidium bromide to be intercalated but yielded a circular dichroic spectrum which had reduced magnitude of both positive circular dichroism at 273 nm and negative circular dichroism at 245 nm. The circular dichroic spectrum of this form is similar to that of RFV DNA. Gel electrophoretic analysis of this DNA revealed that, although part is retained in the groove, another part appeared as a faster-moving band, which we designated as RF I_d. This faster-moving form is cleaved by the restriction endonuclease BamHI at a single site giving a single RF III, comigrating with the RF III obtained from RF I by BamHI cleavage. This signifies that the two strands of RF I did not slide over one another during the formation of RF I_d as suggested previously.     

Properties of a low-pressure inductive RF discharge I: Experiment

Results are presented from experimental studies of low-pressure inductive RF discharges (including those with a capacitive component) employed in plasma technology. It is shown that both the RF power absorbed in the plasma and the electron density depend nonmonotonically on the external magnetic field. Discharge disruptions occurring at critical values of the magnetic field and the spatial redistribution and hysteresis of the plasma parameters were observed when varying the magnetic field and RF generator power. The parameters of the plasma of low-pressure (0.5–5 mTorr) inductive RF discharges were investigated, and the discharge properties related to the redistribution of the RF generator power between the plasma and the discharge external circuit were revealed. The experiments were performed with both conventional unmagnetized inductive plasma sources and plasma sources with a magnetic field.     

Contactless method for studying the parameters of the electrode region of an RF discharge

A nonintrusive contactless method for studying the parameters of the electrode region of a capacitive low-pressure RF discharge is proposed. The method involves the measurements of dc and ac electric voltages at the elements of the discharge circuit with subsequent calculations of both the electrostatic potential drop across the electrode sheath and the sheath thickness by using relations derived in the paper. For a collisionless electrode sheath, the density of the positive-ion current onto the electrode and the charge density at the plasma boundary are determined. It is shown experimentally that the method can be successfully applied to studying capacitive RF discharges with inner or outer electrodes.     

Increase in the discharge duration under the action of ion-cyclotron plasma heating in the T-11M tokamak

Results are presented from experimental and theoretical studies of the heating of a hydrogen plasma with a lithium admixture at the fundamental ion-cyclotron frequency of hydrogen in the T-11M tokamak. It is found experimentally that the action of RF radiation on a hydrogen plasma containing a small amount (less than 4%) of lithium increases the duration of the discharge current pulse. The effect of the increase in the discharge current pulse under the action of RF radiation is simulated numerically.     

Study of high-power pulsed RF generators based on a hollow-cathode discharge

Results are presented from studies of physical principles underlying operation of high-power pulsed RF generators based on a hollow-cathode discharge (HCD). Various types of instabilities that may occur in an HCD and lead to 100% RF modulation of the electrode voltage in the megahertz frequency range are discussed. The design, electric characteristics, and operating modes of HCD-based RF generators are described. Results of experiments aimed at increasing the power and duration of RF pulses are presented. It is demonstrated that such devices are capable of generating 10- to 220-MHz pulses with a power of up to 8 MW, duration of up to 10 μs, and repetition rate of 1 kHz. The discharge chambers of such generators are very simple in design, they have very high stability, and their efficiency reaches 35%.     

Cleaning of inner vacuum surfaces in the Uragan-3M facility by radio-frequency discharges

A method for cleaning vacuum surfaces by a low-temperature (T _e ～ 10 eV) relatively dense (n _e ≈ 10¹² cm^?3) plasma of an RF discharge was developed and successfully applied at the Uragan-3M torsatron. The convenience of the method is that it can be implemented with the same antenna system and RF generators that are used to produce and heat the plasma in the operating mode and does not require retuning the frequencies of the antennas and RF generators. The RF discharge has a high efficiency from the standpoint of cleaning vacuum surfaces. After performing a series of cleanings by the low-temperature RF discharge plasma (about 20000 pulses), (i) the intensity of the CIII impurity line was substantially reduced, (ii) a quasi-steady operating mode with a duration of up to 50 ms, a plasma density of n _e ≈ 10¹² cm^?3, and an electron temperature of up to T _e ～ 1 keV was achieved, and (iii) mass spectrometric analysis of the residual gas in the chamber indicated a significant reduction in the impurity content.     

Generation of low-frequency radiation by a nonequilibrium plasma of an RF discharge in a linear mirror magnetic confinement system

The generation of ion-cyclotron radiation in a plasma resonator formed by an RF discharge in a linear mirror magnetic confinement system is revealed and investigated. It is shown that the experimental setup makes it possible to study the composition of a multicomponent discharge plasma and to detect multiply charged ions. Collisional losses in such a resonator are estimated, and the pressure range within which the growth rate of the ion-cyclotron instability substantially exceeds the collisional damping rate is determined.     

Sterilization effect of atmospheric plasma on Escherichia coli and Bacillus subtilis endospores

Aims:  Escherichia coli and Bacillus subtilis spores were treated with an atmospheric plasma mixture created by the ionization of helium and oxygen to investigate the inactivation efficiency of a low-temperature plasma below 70°C.
Methods and results:  An electrical discharge plasma was produced at a radio frequency (RF) of 13·56 MHz, connected to a perforated circular electrode with a discharge spacing of 1–15 mm. The discharge gas was helium with 0–2% oxygen. For the plasma treatment, a dried E. coli cell or B. subtilis endospore suspension on a cover-glass was exposed to oxygen downstream of the plasma from holes in an RF-powered electrode. The sterilization effect of the RF plasma was highest with 0·2% oxygen, corresponding to the maximum production of oxygen radicals.
Conclusions:  Oxygen radicals generated by RF plasma are effective for the destruction of bacterial cells and endospores.
Significance and Impact of the study:  Low-temperature atmospheric plasma can be used for the disinfection of diverse objects, especially for the inactivation of bacterial endospores.