Structure of a discharge induced by a coaxial microwave plasmatron with a gas-supply channel in the inner electrode

The structure of a discharge induced by a coaxial microwave plasmatron with a gas-supply channel in the inner electrode of a coaxial waveguide is investigated. A plasmatron with a power of up to 10 W operates at a frequency of 10 GHz. Depending on the operation regime, the discharge takes either a filament or torch form. A plasma filament arises at low flow rates of the working gas (argon) and occurs at the border of the potential core of the gas jet. A torch discharge occurs at high flow rates and has the form of a hollow cone. In both cases, the discharge arises in the potential core of the gas jet and does not spread beyond it. The distribution of the microwave field in the discharge plasma is determined.     

Ion flows from a beam-plasma discharge

The results of measurements of the energy distribution function of ions escaping from a beam-plasma discharge are compared with the data from probe measurements in the discharge region. It is shown that, on the discharge axis, there is a region with a higher degree of ionization, whose position depends on the external parameters, in particular, on the gas pressure. The mean energy of the ions that leave the plasma from the outside of this region is determined by the potential of the plasma column. Inside the region with a higher degree of ionization, there is an additional mechanism for ion acceleration; as a result, the energy of the ions that leave the plasma from this region is higher than the energy of the electrostatically accelerated ions by a factor of 1.5 to 5. The results obtained show promise for creating a plasma-processing reactor with controlled ion parameters for the purposes of treating materials for microelectronics.     

Coaxial microwave plasma source

Physical principles underlying the operation of a pulsed coaxial microwave plasma source (micro-wave plasmatron) are considered. The design and parameters of the device are described, and results of experimental studies of the characteristics of the generated plasma are presented. The possibility of application of this type of plasmatron in gas-discharge physics is discussed.     

Investigations of high-energy electrons of the microwave discharge plasma at configuration of the “Magnetor” Bi-dipole magnetic confinement system by X-ray radiation analyses

The results of the investigations of a group of fast electrons in a microwave discharge plasma in the “Magnetor” magnetic trap are presented. The data on the presence and location of this group of electrons is important for estimating the total plasma pressure taking the previous probe measurements into account. Fast electrons are found to be localized within the magnetic separatrix in the region of confinement of the main plasma. The maximal energy of fast electrons is higher than 25 keV.     

Estimation of the electron density and radiative energy losses in a calcium plasma source based on an electron cyclotron resonance discharge

The parameters of a calcium plasma source based on an electron cyclotron resonance (ECR) discharge were calculated. The analysis was performed as applied to an ion cyclotron resonance system designed for separation of calcium isotopes. The plasma electrons in the source were heated by gyrotron microwave radiation in the zone of the inhomogeneous magnetic field. It was assumed that, in such a combined trap, the energy of the extraordinary microwave propagating from the high-field side was initially transferred to a small group of resonance electrons. As a result, two electron components with different transverse temperatures—the hot resonance component and the cold nonresonance component—were created in the plasma. The longitudinal temperatures of both components were assumed to be equal. The entire discharge space was divided into a narrow ECR zone, where resonance electrons acquired transverse energy, and the region of the discharge itself, where the gas was ionized. The transverse energy of resonance electrons was calculated by solving the equations for electron motion in an inhomogeneous magnetic field. Using the law of energy conservation and the balance condition for the number of hot electrons entering the discharge zone and cooled due to ionization and elastic collisions, the density of hot electrons was estimated and the dependence of the longitudinal temperature T _e∥ of the main (cold) electron component on the energy fraction β lost for radiation was obtained.     

Determination of the power absorbed during plasma ECR heating from diamagnetic measurements

Probable reasons are discussed why the absorbed energy determined from diamagnetic measurements in experiments on electron cyclotron resonance plasma heating is less than the input microwave energy.     

Conversion of methane in a coaxial microwave torch

A microwave coaxial plasmatron (microwave torch) is used as a plasmachemical converter of methane into hydrogen and hydrocarbons. The measured energy cost of methane decomposition is close to its minimum theoretical value. Such a low energy cost is unsurpassed for reactors operating at atmospheric pressure. A model of the plasmachemical converter is constructed. The results of calculations in the frame-work of this model agree well with experimental data.     

Microwave torch as a plasmachemical generator of nitric oxides

The possibility of using a microwave coaxial plasmatron (a microwave torch) as an efficient plasmachemical generator of nitric oxides in an air jet has been studied experimentally. A plasmachemical model of the generator is developed. Results of calculations by this model do not contradict experimental results. A conclusion about the mechanisms governing NO_x production in a plasma torch is drawn by comparing the experimental and calculated results.     

Multimode parametric instability during electron cyclotron heating

A study is made of the generation of electron Bernstein waves in the interaction of a microwave field with a magnetized plasma during electron cyclotron heating. Parametric resonance accompanied by simultaneous conversion of microwave-field energy into the energy of numerous waves is analyzed. The relevant dispersion relation is investigated using the Hill method, which has recently been applied for the first time to examine the parametric interaction between high-power microwave radiation and plasmas. It is shown that the dispersion relation can be used to describe the onset of modulational instability at multimode parametric resonance. The growth rate of the modulational instability is obtained. Efficient energy transfer from the microwave field into Bernstein modes and, accordingly, into plasma electrons may be one of the main mechanisms for electron cyclotron resonance plasma heating.     

Spectroscopic and probe measurements of the electron temperature in the plasma of a pulse-periodic microwave discharge in argon

A pulse-periodic 2.45-GHz electron-cyclotron resonance plasma source on the basis of a permanent- magnet mirror trap has been constructed and tested. Variations in the discharge parameters and the electron temperature of argon plasma have been investigated in the argon pressure range of 1 × 10^–4 to 4 × 10^–3 Torr at a net pulsed input microwave power of up to 600 W. The plasma electron temperature in the above ranges of gas pressures and input powers has been measured by a Langmuir probe and determined using optical emission spectroscopy (OES) from the intensity ratios of spectral lines. The OES results agree qualitatively and quantitatively with the data obtained using the double probe.     

Microwave processes in the Octupole Galathea

Results are presented from experimental studies of electromagnetic emission and plasma oscillations in the plasma-frequency range in the Octupole Galathea confinement system. Experiments are performed in the electric-discharge mode at low magnetic fields (the barrier field is 0.002–0.01 T); the working gas is argon or hydrogen. It is found that the most intense microwave oscillations at frequencies of 1–5 GHz are excited near the plasma axis and in the magnetic-barrier region. The oscillations are excited by the discharge current and decay after the voltage is switched off. The experiments show that microwave oscillations excited in the magnetic-barrier region are responsible for the small value of the energy confinement time in the system.     

Displacement of the electron cyclotron resonance heating region and time evolution of the characteristics of short-wavelength turbulence in the 3D magnetic configuration of the L-2M stellarator

Reflection of the heating extraordinary microwave incident obliquely onto the surface of the electron cyclotron resonance (ECR) at the second harmonic of the electron gyrofrequency in the 3D magnetic configuration of the L-2M stellarator was studied experimentally. The plasma was heated using two gyrotrons with a total power of 600–700 kW, the specific heating power being 2.4–2.8 MW/m³. The displacement of the ECR region in the course of heating was monitored by measuring the phase of the reflected extraordinary wave. It is found that the growth of the plasma density is accompanied by the displacement of the ECR heating region from the center of the plasma column toward its periphery. The coefficient of reflection of the heating microwave beam from the ECR region was measured. The spectra of short-wavelength (k _s ≈ 30 cm^?1) plasma density fluctuations were explored by analyzing backscattered microwave radiation. A tenfold increase in the energy of short-wavelength density fluctuations and the growth of the spectral density of fluctuations in the frequency range of 0.3–1.5 MHz were observed.     

Emission spectroscopy diagnostics of rare gases in the PNX-U facility

Results are presented from measurements of the electron temperature and neutral atom density in a low-temperature microwave plasma by the method of emission spectroscopy. The measurements were conducted in the PNX-U facility—a magnetic confinement system with a “magnetic wall.” Multichord measurements of plasma radiation at a wavelength of 750.37 nm were performed with the help of an absolutely calibrated monochromator. The neutral atom density was calculated using the collisional-radiative model. The degree of plasma ionization near the axis of the facility was found to be close to unity. The electron temperature of the argon plasma was measured from the relative intensities of the spectral lines of neutral helium injected in small amounts into the plasma (the so-called helium thermometer method). At a low microwave heating power, the results of these measurements agree well with the results of probe measurements.     

Studies of pulsed and continuous microwave discharges used to deposit diamond films

Results are presented from optical measurements of the atomic hydrogen density and the gas temperature in a reactor for depositing diamond films from the plasmas of pulsed and continuous microwave discharges at a fixed mean microwave power. The results obtained make it possible to explain the fact that the growth rate of diamond films in the plasma of a pulsed microwave discharge is larger than that in a continuous microwave discharge.     

One-dimensional semiempirical model of plasma in an accelerator with closed electron drifts

The plasma structure in an accelerator with closed electron drifts is investigated experimentally and numerically based on the measured data on the angular and energy ion distribution in a plasma jet. The mathematical model is constructed in a one-dimensional steady-state approximation and is aimed at calculating spatial distributions of the electric potential and plasma density in the region of the most intense ionization of neutral atoms. A comparison of the numerically calculated model potential distributions with the results from direct probe measurements shows that the proposed approach provides an online analysis of the plasma structure in the ionization-acceleration zone.     

Reflection and backscattering of microwaves under doubling of the plasma density and displacement of the gyroresonance region during electron cyclotron resonance heating of plasma in the l-2M stellarator

Reflection and backscattering of high-power (400 kW) gyrotron radiation creating and heating plasma at the second harmonic of the electronic cyclotron frequency in the L-2M stellarator have been investigated experimentally. The effect of the displacement of the gyroresonance region from the axis of the plasma column under doubling of the plasma density on the processes of reflection and backscattering of microwave radiation has been examined. A near doubling of short-wavelength (k _⊥ ≈ 30 cm^–1) turbulent density fluctuations squared is observed. The change in the energy confinement time under variations of plasma parameters and characteristics of short-wavelength turbulence is discussed. A discrepancy between the measured values of the reflection coefficient from the electron cyclotron resonance heating region and predictions of the one-dimensional model is revealed.     

Propagation and amplification of microwave radiation in a plasma channel created in gas by a high-power femtosecond UV laser pulse

The time evolution of a nonequilibrium plasma channel created in a noble gas by a high-power femtosecond KrF laser pulse is investigated. It is shown that such a channel possesses specific electrodynamic properties and can be used as a waveguide for efficient transportation and amplification of microwave pulses. The propagation of microwave radiation in a plasma waveguide is analyzed by self-consistently solving (i) the Boltzmann kinetic equation for the electron energy distribution function at different spatial points and (ii) the wave equation in the parabolic approximation for a microwave pulse transported along the plasma channel.     

Fluorescence depolarization studies of red cell membrane fluidity. The effect of exposure to 1.0-GHz microwave radiation

The internal viscosity of human red blood cell membranes was investigated during exposure to continuous wave 1.0-GHz microwave radiation using fluorescence measurements of a lipid seeking molecular probe, diphenylhexatriene. Samples were exposed in a Crawford cell arranged so that fluorescence was measured during microwave exposure; specific absorption rates calculated from electrical measurements were approximately 0.6, 2 and 15 W/kg. Measurements were obtained at selected temperatures between 15 °C and 40 °C and as a function of the duration of exposure at 23 °C. Arrhenius-type plots of the temperature profile data were linear and showed no difference between exposed and control samples. The exposure duration data also showed no difference between exposed and control samples except for a small effect of elevated temperature at the highest exposure. The activation energy for motion of the fluorescent probe in its environment within the membrane lipid was not affected by the application of the microwave energy and no evidence for a lipid phase transition was found. These results indicate that the increased cation efflux from red cells, observed by others at certain transition temperatures during microwave exposure, was more likely to have been caused by alteration of the membrane bound protein than by changes in the lipid constituents of the red cell membrane.     

Pulsed microwave discharge in a capillary filled with atmospheric-pressure gas

A pulsed microwave coaxial capillary plasma source generating a thin plasma filament along the capillary axis in an atmospheric-pressure argon flow is described. The dynamics of filament formation is studied, and the parameters of the gas and plasma in the contraction region are determined. A physical model of discharge formation and propagation is proposed. The model is based on the assumption that, under the conditions in which the electric fields is substantially below the threshold value, the discharge operates in a specific form known as a self-sustained-non-self-sustained (SNS) microwave discharge.     

Gas temperature in the plasma of a low-pressure electrode microwave discharge in hydrogen

The gas temperature in an electrode microwave discharge in hydrogen at pressures of 1–8 torr and input powers of 20–90 W is determined from the relative intensities of the rotational lines of the electronically excited molecules of the Fulcher α system of molecular hydrogen. It is found that the gas temperature in the discharge is no higher than 800 K over the entire range of the experimental conditions under study. For this reason, plasma resonance cannot be regarded as a factor determining the physical processes in the discharge over the entire pressure range. Since the discharge unit is a nonuniform gas-dynamic system (the gas is fed through a small hole into a chamber of limited size), there is a possibility of generating vortex flows that intensively mix the gas. This results in a uniform distribution of the gas temperature throughout the entire volume of the spherical plasma structure produced in the experiment.