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1.
The results of measurements of the energy distribution function of ions escaping from a beam-plasma discharge are compared with the data from probe measurements in the discharge region. It is shown that, on the discharge axis, there is a region with a higher degree of ionization, whose position depends on the external parameters, in particular, on the gas pressure. The mean energy of the ions that leave the plasma from the outside of this region is determined by the potential of the plasma column. Inside the region with a higher degree of ionization, there is an additional mechanism for ion acceleration; as a result, the energy of the ions that leave the plasma from this region is higher than the energy of the electrostatically accelerated ions by a factor of 1.5 to 5. The results obtained show promise for creating a plasma-processing reactor with controlled ion parameters for the purposes of treating materials for microelectronics.  相似文献   

2.
The effect of an RF field on a steady-state beam-plasma discharge with a plane electrode placed parallel to a sheetlike electron beam is studied experimentally. The plasma parameters were measured by a single probe, and the electron distribution function was determined with the use of an electrostatic analyzer. The energy and current of the electron beam were E B=2.5 keV and J B=0.05–1.5 A, respectively. The working pressure was p=2×10?5–10?3 torr. The frequency of the external RF field was 13.56 MHz. Both the steady-state regimes in which the RF field had no effect on the plasma parameters and regimes with a pronounced effect of the RF field were observed. The experiments show that the regime of the discharge depends strongly on the plasma density and the magnetic field. The parametric instability is studied theoretically in the weak-turbulence approximation. It is shown that, due to the decay nature of the spectrum of plasma oscillations, the onset of instability is accompanied by the transfer of the energy of fluctuations over the spectrum, from the pump frequency toward its harmonics.  相似文献   

3.
The mechanism responsible for the previously discovered phenomenon of acceleration of an ion flow along the normal to the axis of a beam-plasma discharge in a weak magnetic field is investigated. It is suggested that the ions are accelerated in the field of a helicon wave excited in the discharge plasma column. It is shown theoretically that, under actual experimental conditions, a helicon wave can be excited at the expense of the energy of an electron beam. The spectral parameters and spatial structure of the waves excited in a beam-plasma discharge in the frequency ranges of Langmuir and helicon waves are studied experimentally and are shown to be related to the parameters of the ion flow. Theoretical estimates are found to agree well with the experimental results.  相似文献   

4.
The production of O2(a1Δg) singlet oxygen in non-self-sustained discharges in pure oxygen and mixtures of oxygen with noble gases (Ar or He) was studied experimentally. It is shown that the energy efficiency of O2(a1Δg production can be optimized with respect to the reduced electric field E/N. It is shown that the optimal E/N values correspond to electron temperatures of 1.2–1.4 eV. At these E/N values, a decrease in the oxygen percentage in the mixture leads to an increase in the excitation rate of singlet oxygen because of the increase in the specific energy deposition per O2 molecule. The onset of discharge instabilities not only greatly reduces the energy efficiency of singlet oxygen production but also makes it impossible to achieve high energy deposition in a non-self-sustained discharge. A model of a non-self-sustained discharge in pure oxygen is developed. It is shown that good agreement between the experimental and computed results for a discharge in oxygen over a wide range of reduced electric fields can be achieved only by taking into account the ion component of the discharge current. The cross section for the electron-impact excitation of O2(a1Δg and the kinetic scheme of the discharge processes with the participation of singlet oxygen are verified by comparing the experimental and computed data on the energy efficiency of the production of O2(a1Δg and the dynamics of its concentration. It is shown that, in the dynamics of O2(a1Δg molecules in the discharge afterglow, an important role is played by their deexcitation in a three-body reaction with the participation of O(3P) atoms. At high energy depositions in a non-self-sustained discharge, this reaction can reduce the maximal attainable concentration of singlet oxygen. The effect of a hydrogen additive to an Ar: O2 mixture is analyzed based on the results obtained using the model developed. It is shown that, for actual electron beam current densities, a significant energy deposition in a non-self-sustained discharge in the mixtures under study can be achieved due to the high rate of electron detachment from negative ions. In this case, however, significant heating of the mixture can lead to a rapid quenching of O2(a1Δg molecules by atomic hydrogen.  相似文献   

5.
Spectra of detached electrons produced in mutual collisions of D ions in the relative energy range of 1.8−6.1 eV were investigated. In addition to electrons corresponding to conversion of D ions into D0 atoms, peaks corresponding to the production of D2 molecules and D2 molecular ions in the ground electronic state were revealed. The existence of D2 ions over a time longer than the period of molecular oscillations was confirmed experimentally for the first time.  相似文献   

6.
A method is proposed for determining the electron density N e and the electric field E in the non-equilibrium nitrogen plasma of a low-pressure discharge from the spectra of the second positive system of N2. The method is based on measuring the specific energy deposition in the plasma and the distribution of nitrogen molecules over the vibrational levels of the C 3Π u state, as well as on modeling this distribution for a given energy deposition. The fitting parameters of the model are the values of N e and E. A kinetic model of the processes governing the steady-state density of the C 3Π u nitrogen molecules is developed. The testing of this method showed it to be quite reliable. The method is of particular interest for diagnosing electrodeless discharges and provides detailed information on the processes occurring in the discharge plasma. Preliminary data are obtained on the plasma parameters in a cavity microwave discharge and an electrode microwave discharge. In particular, it is found that the electric field in an electrode microwave discharge in nitrogen is lower than that in a hydrogen discharge. This effect is shown to be produced by stepwise and associative processes with the participation of excited particles in nitrogen.  相似文献   

7.
A one-dimensional hydrodynamic model of a dielectric-barrier discharge (DBD) in pure chlorine is developed, and the properties of the discharge are modeled. The discharge is excited in an 8-mm-long discharge gap between 2-mm-thick dielectric quartz layers covering metal electrodes. The DBD spatiotemporal characteristics at gas pressures of 15–100 Torr are modeled for the case in which a 100-kHz harmonic voltage with an amplitude of 8 kV is applied to the electrodes. The average power density deposited in the discharge over one voltage period is 2.5–5.8 W/cm3. It is shown that ions and electrons absorb about 95 and 5% of the discharge power, respectively. In this case, from 67 to 97% of the power absorbed by electrons is spent on the dissociation and ionization of Cl2 molecules. Two phases can be distinguished in the discharge dynamics: the active (multispike) phase, which follows the breakdown of the discharge gap, and the passive phase. The active phase is characterized by the presence of multiple current spikes, a relatively high current, small surface charge density on the dielectrics, and large voltage drop across the discharge gap. The passive phase (with no current spikes) is characterized by a low current, large surface charge density on the dielectrics, and small voltage drop across the discharge gap. The peak current density in the spikes at all pressures is about 4 mA/cm2. In the multispike phase, there are distinct space charge sheaths with thicknesses of 1.5–1.8 mm and a mean electron energy of 4.3–7 eV and the central region of quasineutral plasma with a weak electric field and a mean electron energy of 0.8–3 eV. The degree of ionization of chlorine molecules in the discharge is ~0.02% at a pressure of 15 Torr and ~0.01% at 100 Torr. The DBD plasma is electronegative due to the fast attachment of electrons to chlorine atoms: e + Cl2 → Cl + Cl. The most abundant charged particles are Cl 2 + and Cl? ions, and the degree of ionization during current spikes in the active phase is (4.1–5.5) × 10–7. The mechanism of discharge sustainment is analyzed. The appearance of a series of current spikes in the active phase of the discharge is explained.  相似文献   

8.
Results are presented from Z-pinch experiments performed in the S-300 facility (Kurchatov Institute) at a maximum current of 2 MA and current rise time of 100 ns. The Z-pinch load was a 1-cm-long 1-cmdiameter cylindrical array made of 40 tungsten wires with a total mass of 160 μg, at the axis of which a 100-μm-diameter (CD2) n deuterated fiber was installed. Hard X-ray and neutron signals were recorded using five scintillation detectors oriented in one radial and two axial directions. The maximum neutron yield from the DD reaction reached 3 × 109 neutrons per shot. The average neutron energy was determined from time-of-flight measurements and Monte Carlo simulations under the assumption that the neutron emission time was independent of the neutron energy. The average neutron energy in different experiments was found to vary within the range 2.5–2.7 MeV. The fact that the average neutron energy was higher than 2.45 MeV (the energy corresponding to the DD reaction) is attributed to the beam-target collisional mechanism for the acceleration of deuterons to 100–500 keV.  相似文献   

9.
The effect of the dc electric field on the near-surface plasma of an electrode microwave discharge at pressures of 1?C5 Torr was studied by the emission spectroscopy method. It is shown that the dc field weakly affects the vibrational distribution of nitrogen molecules in the C3??u state, but changes the structure of the near-surface plasma (shifting the intensity maxima of the emission bands) and the strength of the microwave field near the electrode surface. It is also found that the ratio between the intensities of bands of different sequences of the second positive system of nitrogen radiated from the same state depends on the position along the discharge axis.  相似文献   

10.
The conversion of ethylene (C2H4) at concentrations of 400 and 930 ppm in an air flow at a temperature of 295 K is simulated. Ethylene is added to air either upstream of the discharge chamber or in the reaction tube, downstream of a pulsed corona discharge. It is taken into account that the distribution of the gas components in the discharge zone is nonuniform due to the streamer nature of the discharge. In the reaction tube, all of the components are assumed to be uniform. Simulation results agree with the experiments carried out at voltage pulse amplitudes of 30 and 40 kV, a gas flow rate of 2–10 l/min, and a specific energy deposition of up to 0.15 J/cm3. It is shown that the ozone produced plays a governing role in the C2H4 conversion. It is found that it is possible to minimize the energy spent on conversion by choosing the optimum pulse repetition rate and the specific energy deposited per pulse. The presence of water vapor impedes the ethylene conversion and increases the concentration of formaldehyde and methane.  相似文献   

11.
The paper presents the results of X-ray source spatial distribution measurements of a low-inductance vacuum spark discharge based on the analysis of helium-like ions spectral lines structure. The intensities of spectral lines of FeXXV ions and dielectronic satellites with spatial resolution were measured. The polarization of satellite line 1s2p 2 2 D 5/2-1s 22p 2 P 3/2 was found. The obtained dependence of maximum plasma parameters during micropinch events from initial plasma line density in discharge corresponds to the radiative collapse model.  相似文献   

12.
Fast neutral atom and molecule beams have been studied, the beams being produced in a vacuum chamber at nitrogen, argon, or helium pressure of 0.1–10 Pa due to charge-exchange collisions of ions accelerated in the sheath between the glow discharge plasma and a negative grid immersed therein. From a flat grid, two broad beams of molecules with continuous distribution of their energy from zero up to e(U + U c ) (where U is voltage between the grid and the vacuum chamber and U c is cathode fall of the discharge) are propagating in opposite directions. The beam propagating from the concave surface of a 0.2-m-diameter grid is focused within a 10-mm-diameter spot on the target surface. When a 0.2-m-diameter 0.2-m-high cylindrical grid covered by end disks and composed of parallel 1.5-mm-diameter knitting needles spaced by 4.5 mm is immersed in the plasma, the accelerated ions pass through the gaps between the needles, turn inside the grid into fast atoms or molecules, and escape from the grid through the gaps on its opposite side. The Doppler shift of spectral lines allows for measuring the fast atom energy, which corresponds to the potential difference between the plasma inside the chamber and the plasma produced as a result of charge-exchange collisions inside the cylindrical grid.  相似文献   

13.
The mechanism for the formation of the inverse electron distribution function is proposed and realized experimentally in a nitrogen plasma of a hollow-cathode glow discharge. It is shown theoretically and experimentally that, for a broad range of the parameters of an N2 discharge, it is possible to form a significant dip in the profile of the electron distribution function in the energy range ε=2–4 eV and, accordingly, to produce the inverse distribution with df(ε)/d?>0. The formation of a dip is associated with both the vibrational excitation of N2 molecules and the characteristic features of a hollow-cathode glow discharge. In such a discharge, the applied voltage drops preferentially across a narrow cathode sheath. In the main discharge region, the electric field E is weak (E<0.1 V/cm at a pressure of about p~0.1 torr) and does not heat the discharge plasma. The gas is ionized and the ionization-produced electrons are heated by a beam of fast electrons (with an energy of about 400 eV) emitted from the cathode. A high-energy electron beam plays an important role in the formation of a dip in the profile of the electron distribution function in the energy range in which the cross section for the vibrational excitation of nitrogen molecules is maximum. A plasma with an inverted electron distribution function can be used to create a population inversion in which more impurity molecules and atoms will exist in electronically excited states.  相似文献   

14.
Results of particle-in-sell simulations of ion acceleration by using the KARAT code in a cylindrical geometry in the problem formulation corresponding to an actual experiment with a low-energy vacuum discharge with a hollow cathode are presented. The fundamental role of the formed virtual cathode is analyzed. The space-time dynamics of potential wells related to the formation of the virtual cathode is discussed. Quasi-steady potential wells (with a depth of ∼80% of the applied voltage) cause acceleration of deuterium ions to energies about the electron beam energy (∼50 keV). In the well, a quasi-isotropic velocity distribution function of fast ions forms. The results obtained are compared with available data on inertial electrostatic confinement fusion (IECF). In particular, similar correlations between the structure of potential wells and the neutron yield, as well as the scaling of the fusion power density, which increases with decreasing virtual cathode radius and increasing potential well depth, are considered. The chosen electrode configuration and potential well parameters provide power densities of nuclear DD fusion in a nanosecond vacuum discharge noticeably higher than those achieved in other similar IECF systems.  相似文献   

15.
An analysis is made of a flow of Ar plasma imitating plasma flows in ion separation systems such as systems for processing spent nuclear fuel or ion cyclotron resonance isotope separation systems. It is found that the electron temperature is equalized along the flow by electron heat conduction. When the electron temperature is not too low (T e E ion/10, where E ion is the ionization energy), multicharged ions are intensely produced along the entire flow. It is shown that this process is accompanied by the flow acceleration. Difficulties in describing a supersonic flow by hydrodynamic equations are pointed out.  相似文献   

16.
The effect of the nonlocal nature of the electron distribution function on the dissociation rate of oxygen molecules in a dc glow discharge is studied. The concentration of oxygen atoms and the probability of their loss at the discharge tube wall are measured as functions of the discharge parameters by means of the timeresolved actinometric method involving argon atoms. An analysis of the measurement data in terms of both a discharge model in which the effect of the nonlocal nature of the electron energy spectrum is taken into account and a model in which this effect is ignored makes it possible to thoroughly investigate the balance of oxygen atoms in the discharge. The production rate of O(3P) atoms and their concentration in the plasma are calculated with allowance for the nonlocal nature of the electron energy distribution function. The calculated values agree well with the experimental data and differ substantially from those obtained using a spatially homogeneous distribution function.  相似文献   

17.
Results are presented from experimental studies of ion acceleration under the action of femtosecond laser pulses with an intensity of 1017 W/cm2, incident onto the free surfaces of melted gallium and indium. The effect of the polarization direction of a linearly polarized laser pulse and the amplitude of a short prepulse, which precedes the main pulse by several nanoseconds, on the parameters of accelerated ions is investigated. It is found that, even for such a moderate laser intensity, the characteristic velocity of fast ions ejected along the reflected beam is a factor of 1.5 higher than that of ions ejected along the normal to the target surface. It is shown that, as the prepulse energy increases, the hard X-ray yield and the mean energy of hot electrons increase substantially, whereas the velocity of both fast and slow ions decreases appreciably regard-less of laser polarization.  相似文献   

18.
The influence of different antecedent conditions on hydrochemical response during storm events was investigated in a small, south-western Cape mountain catchment. Winter and summer storms (four in total) were sampled both before and after the catchment was deliberately burnt. During winter storms, discharge responded rapidly to rainfall, and direct runoff represented the major component of streamflow. Marked lags were observed between rainfall and discharge peaks during the summer storms, and streamflow was dominated by delayed interflow. Chloride, PO inf4 sup3– -P and NO inf3 sup– -N exhibited variable response to discharge according to seasonal variations in soil-moisture levels, whereas the response of HCO inf3 sup– , H+ and NH inf4 sup+ -N was not influenced by season. The movement of ions appears to be affected more by geochemical processes operating within the soil than by plant-uptake dynamics, as the prescribed burn appeared to have little effect on relationships between ionic concentration and discharge. The findings of the study highlight the complexity of relationships between solute concentration and discharge.  相似文献   

19.
Results are presented from experimental and theoretical studies of the optical characteristics and parameters of the plasma of an atmospheric-pressure barrier discharge excited in a HgBr2: N2: He mixture, which was used as the working medium of a small-size (with a radiation area of 8 cm2) exciplex gas-discharge radiation source. The mean radiation power of 87 mW was achieved at the radiation wavelength λmax = 502 nm. The electron energy distribution function, the transport characteristics, the specific energy lost in the processes involving electrons, the electron temperature and density, and the rate constants of elastic and inelastic electron scattering by the components of the working mixture were calculated as functions of the reduced field E/N. The plasma of a discharge excited in a HgBr2: N2: He mixture can be used as the working medium of a small-size blue-green radiation source. Such a source can find application in biotechnology, photonics, and medicine and can also be used to manufacture gas-discharge display panels.  相似文献   

20.
The influence of the chlorine concentration on the radiation efficiency of coaxial exciplex lamps (excilamps) excited by a dielectric barrier discharge (DBD) in binary Xe-Cl2 mixtures at pressures of 240–250 Torr is investigated experimentally and theoretically. The experiments were carried out at Cl2 concentrations in the range of 0.01–1%. The DBD characteristics were calculated in the framework of a one-dimensional hydrodynamic model at Cl2 concentrations in the range of 0.1–5%. It is found that the radiation intensities of the emission bands of Xe*2(172 nm) and XeCl* (308 nm) are comparable when the chlorine concentration in the mixture is in the range of 0.01–0.1%. In this case, in the mixture, the radiation intensity of the Xe*2 molecule rapidly decreases with increasing Cl2 concentration and, at a chlorine concentration of ≥0.2%, the radiation of the B → X band of XeCl* molecules with a peak at 308 nm dominates in the discharge radiation. The radiation efficiency of this band reaches its maximum value at chlorine concentrations in the range of 0.4–0.5%. The calculated efficiencies of DBD radiation exceed those obtained experimentally. This is due to limitations of the one-dimensional model, which assumes the discharge to be uniform in the transverse direction, whereas the actual excilamp discharge is highly inhomogeneous. The influence of the chlorine concentration on the properties of the DBD plasma in binary Xe-Cl2 mixtures is studied numerically. It is shown that an increase in the Cl2 concentration in the mixture leads to the attachment of electrons to chlorine atoms and a decrease in the electron density and discharge conductivity. As a result, the electric field and the voltage drop across the discharge gap increase, which, in turn, leads to an increase in the average electron energy and the probability of dissociation of Cl2 molecules and ionization of Xe atoms and Cl2 molecules. The total energy deposited in the discharge rises with increasing chlorine concentration due to an increase in the power spent on the heating of positive and negative ions. The power dissipated by electrons decreases with increasing chlorine concentration in the working mixture. Recommendations on the choice of the chlorine content in the mixture for reducing the intensity of VUV radiation of the second continuum of the Xe*2 excimer without a substantial decrease in the excilamp efficiency are formulated.  相似文献   

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