Model for calculating low-current moderate-pressure RF discharges with photon-driven secondary electron photoemission from the electrode surface

A model is developed for calculating a low-current moderate-pressure RF discharge with allowance for an electron cloud that is formed by electrons produced during the preceding periods of the RF field and fills the electrode sheath at regular intervals in accordance with the phase of the RF voltage applied to the electrodes. The cloud arises due to a phase shift of π/2 between the voltage across the sheath and that across the column of a low-current RF discharge plasma. The photon generation mechanism is as follows: as the cloud electrons fill the sheath, they acquire energy in superelastic collisions with metastables produced by the sheath electrons during the preceding periods of the RF field and then excite the metastable states to emitting levels. The discharge sheath forms due to the overlap of the secondary electron avalanches triggered by electron photoemission from the electrode surface. The parameters of the sheath in a low-current RF discharge are determined by the conditions under which the electron photoemission current in the sheath is self-sustaining, but the capacitive susceptance of the sheath is substantially higher than its active electrical conductance. The results of calculations are compared with the experimental data.     

Low-current moderate-pressure RF discharge with secondary electron photoemission

A model is proposed for a low-current RF discharge with secondary electron photoemission from the electrode surface caused by photons originating in the electrode sheath. The low-current state of RF discharges at moderate pressures is peculiar in that the electrons and ions produced during the preceding periods of the RF field promote the development of the discharge during subsequent periods. Since the ion space charge is induced during many periods of the RF field, even comparatively moderate fields in the electrode sheath are sufficient to ensure the conditions under which the current is self-sustaining, in which case the electron photoemission dominates over the remaining secondary processes at the electrode surface. In a low-current RF discharge, the ion-electron emission has essentially no impact on the formation of the electrode sheath because the half-period of the RF field is much shorter than the ion transit time through the sheath. The sheath results from the overlap of the secondary electron avalanches triggered by electron photoemission from the electrode surface. The sheath parameters are determined by the conditions under which the current in the sheath is selfsustaining due to the secondary electron photoemission from the electrode surface. The capacitive susceptance of the electrode sheath is substantially higher than its electrical conductance. Low-current RF discharges can only exist when the time required for the ions to drift through the sheath and reach the electrode is much longer than the half-period of the RF field.     

Radio-frequency discharge in a molecular gas flow at a frequency of 1.76 MHz

Results are presented from experiments on the initiation of a homogeneous stable capacitive RF discharge at a frequency of 1.76 MHz in a high-speed molecular gas flow between metal electrodes at a pressure of 5 Torr or dielectric-coated electrodes at a pressure of up to 50 Torr. A mechanism of the current closure in the electrode sheaths related to the primary photoelectric current generated alternately from different electrodes is proposed. The average electron energy increases via second-kind (superelastic) collisions, and fast electrons with energies corresponding to the amplitude value of the RF voltage appear in the electron energy spectrum. As a result, primary emission arises due to the excitation of emitting states from metastable molecular levels. The primary photoelectric current initiates electron avalanches in the electrode sheaths due to secondary photoelectron emission. According to calculations, the current?voltage characteristic of the sheath in this type of discharge is ascending and the field strengths in the electrode sheath and positive column are lower than those in a self-sustained dc discharge. The calculated results are compared with the experimental data.     

Contactless method for studying the parameters of the electrode region of an RF discharge

A nonintrusive contactless method for studying the parameters of the electrode region of a capacitive low-pressure RF discharge is proposed. The method involves the measurements of dc and ac electric voltages at the elements of the discharge circuit with subsequent calculations of both the electrostatic potential drop across the electrode sheath and the sheath thickness by using relations derived in the paper. For a collisionless electrode sheath, the density of the positive-ion current onto the electrode and the charge density at the plasma boundary are determined. It is shown experimentally that the method can be successfully applied to studying capacitive RF discharges with inner or outer electrodes.     

Plasma parameters and existence conditions of monolayer dust structures in the electrode sheath of an RF discharge

The plasma parameters in the electrode sheath of an RF discharge were studied experimentally under the conditions of dust monolayer levitation. A new method is proposed for determining the plasma parameters, such as the average electric field, ion density, and ion velocity. The screening parameter and the dust grain charge are estimated. The criteria of stable levitation of a dust monolayer are considered. The obtained results are compared with the available theoretical and numerical data, as well as with the results obtained using other diagnostic methods.     

Positive column of a glow discharge in neon with charged dust grains (a review)

The effect of charged micron-size dust grains (microparticles) on the electric parameters of the positive column of a low-pressure dc glow discharge in neon has been studied experimentally and numerically. Numerical analysis is carried out in the diffusion-drift approximation with allowance for the interaction of dust grains with metastable neon atoms. In a discharge with a dust grain cloud, the longitudinal electric field increases. As the number density of dust grains in an axisymmetric cylindrical dust cloud rises, the growth of the electric field saturates. It is shown that the contribution of metastable atoms to ionization is higher in a discharge with dust grains, in spite of the quenching of metastable atoms on dust grains. The processes of charging of dust grains and the dust cloud are considered. As the number density of dust grains rises, their charge decreases, while the space charge of the dust cloud increases. The results obtained can be used in plasma technologies involving microparticles.     

Characteristics of a DC discharge with a water cathode in argon

The characteristics of a dc discharge excited between a metal anode and a water cathode in argon were studied experimentally. The dimensions of the positive column and the electric field in it were measured, and the vibrational temperature in the positive column was determined from the N₂ C ³Π_u → B ³Π_g (0–2) emission band. It is shown that the power deposited in the positive column is almost entirely spent on gas heating. The obtained dependence of the reduced electric field on the gas pressure and the ionization frequencies calculated by solving the Boltzmann equation indicate that electrons are lost diffusively, whereas ionization proceeds in a stepwise manner via the lower metastable states of argon atoms.     

Formation of a spark discharge in an inhomogeneous electric field with current limitation by a large ballast Resistance

Results of studies of a spark discharge initiated in argon in a point–plane electrode gap with limitation of the discharge current by a large ballast resistance are presented. It is shown that the current flowing through the plasma channel of such a low-current spark has the form of periodic pulses. It is experimentally demonstrated that, when a low-current spark transforms into a constricted glow discharge, current pulses disappear, the spatial structure of the cathode glow changes abruptly, and a brightly glowing positive plasma column forms in the gap.     

Nonisothermal theory of the positive column of an electric discharge in the axial magnetic field

A nonisothermal model of the positive column allowing for electron energy balance is analyzed. The influence of the axial magnetic field on the characteristics of the cylindrical positive column of a low-pressure discharge is investigated in the hydrodynamic approximation. It is shown that the magnetic field affects the plasma density distribution, plasma velocity, and electron energies. The radial dependences of the plasma density, electron energy, and plasma velocity, as well as the azimuthal velocities of electrons and ions, are calculated for helium at different values of the magnetic field strength. It is established that inertia should be taken into account in the equations for the azimuthal motion of electrons and ions. The results obtained in the hydrodynamic approximation differ significantly from those obtained in the framework of the common diffusion model of the positive column in the axial magnetic field. It is shown that the distributions of the plasma density and radial plasma velocity in the greater part of the positive column tend to those obtained in the diffusion approximation at higher values of the axial magnetic field and gas density, although substantial differences remain in the near-wall region.     

Evolutionary sheath structure in magnetized collisionless plasma with electron inertia

A classical hydrodynamic model is methodologically formulated to see the equilibrium properties of a planar plasma sheath in two-component magnetized bounded plasma. It incorporates the weak but finite electron inertia instead of asymptotically inertialess electrons. The effects of the externally applied oblique (relative to the bulk plasma flow) magnetic field are judiciously accented. It is, for the sake of simplicity, assumed that the relevant physical parameters (plasma density, electrostatic potential, and flow velocity) vary only in a direction normal to the confining wall boundary. It is noticed for the first time that the derived Bohm condition for sheath formation is modified conjointly by the electron inertia, magnetic field, and field orientation. It is manifested that the electron inertia in the presence of plasma gyrokinetic effects slightly enhances the ion Mach threshold value (typically, M _i0 ≥ 1.139) toward the sheath entrance. This flow supercriticality is in contrast with the heuristic formalism (M _i0 ≥ 1) for the zero-inertia electrons. A numerical illustrative scheme on the parametric sheath features on diverse nontrivial apposite arguments is constructed alongside ameliorative scope.     

Determination of the electron density and electric field in the plasma of a low-pressure microwave electrode discharge in hydrogen from the measured spectral line intensities

The parameters of the plasma of a microwave electrode discharge in hydrogen at pressures of 1–8 torr and incident powers of 20–80 W are measured by the so-called “relative intensity” method. The method allows one to determine the electron density and electric field in plasma by measuring the relative intensities of the H_α, H_β, and 763.5-nm Ar line emission and calculating the electron-impact rate constants from the homogeneous Boltzmann equation. The measurements show that there are regions in the discharge where the electron density is higher (a bright electrode sheath) and lower (a spherical region) than the critical density for the frequency 2.45 GHz (n_cr～7×10¹⁰ cm^?3). Inside the spherical region, the electric field varies slightly over the radius and the electron density increases as the discharge boundary is approached. The observed discharge structure can be attributed to the presence of a self-sustained discharge zone (electrode sheath); a non-self-sustained discharge zone (spherical region); and a decaying plasma region, which is separated from the active discharge zone by an electric double layer.     

Experimental study of a low-pressure glow discharge in air in large-diameter discharge tubes: I. conditions for the normal regime of a glow discharge

The initiation and characteristics of a low-pressure glow discharge in air in large-diameter discharge tubes are studied. A deviation from the Paschen law is observed: the breakdown curves U _dc(pL) shift toward the higher values of U _dc and pL as the interelectrode distance L increases. It is shown that the normal regime of a glow discharge is accompanied by gas ionization in the anode sheath. This takes place only for pL values lying to the right of the inflection point in the breakdown curve. The cathode-sheath characteristics in the normal and abnormal regimes of an air discharge for a duralumin cathode are determined. The axial profiles of the ion density, electron temperature, and plasma potential, as well as the anode voltage drop, are measured at various air pressures.     

Effect of an external RF field on the beam-plasma discharge in a magnetic field

The effect of an RF field on a steady-state beam-plasma discharge with a plane electrode placed parallel to a sheetlike electron beam is studied experimentally. The plasma parameters were measured by a single probe, and the electron distribution function was determined with the use of an electrostatic analyzer. The energy and current of the electron beam were E _B=2.5 keV and J _B=0.05–1.5 A, respectively. The working pressure was p=2×10^?5–10^?3 torr. The frequency of the external RF field was 13.56 MHz. Both the steady-state regimes in which the RF field had no effect on the plasma parameters and regimes with a pronounced effect of the RF field were observed. The experiments show that the regime of the discharge depends strongly on the plasma density and the magnetic field. The parametric instability is studied theoretically in the weak-turbulence approximation. It is shown that, due to the decay nature of the spectrum of plasma oscillations, the onset of instability is accompanied by the transfer of the energy of fluctuations over the spectrum, from the pump frequency toward its harmonics.     

Study of the dark phase in the initial stage of the positive column formation in an argon glow discharge

The initial stage of the positive column formation in an argon glow discharge is investigated both experimentally and theoretically. A decrease in the plasma radiation intensity (the so-called “dark phase”) was observed experimentally over a time period of about 1 ms. A similar dip was also observed in the time dependence of the electric field strength. The time evolution of the population of the lowest metastable state of Ar was measured. A relevant theoretical model has been developed and used to perform calculations for the actual experimental conditions. A comparison between the numerical and experimental results shows that the model adequately describes the processes that occur during the formation of the positive column in an argon glow discharge. Experimental and theoretical study shows that the dark-phase effect is related to an excessive amount of metastable Ar atoms at the beginning of a discharge and, consequently, to high rates of stepwise ionization and chemionization.     

Estimation of the electron density and radiative energy losses in a calcium plasma source based on an electron cyclotron resonance discharge

The parameters of a calcium plasma source based on an electron cyclotron resonance (ECR) discharge were calculated. The analysis was performed as applied to an ion cyclotron resonance system designed for separation of calcium isotopes. The plasma electrons in the source were heated by gyrotron microwave radiation in the zone of the inhomogeneous magnetic field. It was assumed that, in such a combined trap, the energy of the extraordinary microwave propagating from the high-field side was initially transferred to a small group of resonance electrons. As a result, two electron components with different transverse temperatures—the hot resonance component and the cold nonresonance component—were created in the plasma. The longitudinal temperatures of both components were assumed to be equal. The entire discharge space was divided into a narrow ECR zone, where resonance electrons acquired transverse energy, and the region of the discharge itself, where the gas was ionized. The transverse energy of resonance electrons was calculated by solving the equations for electron motion in an inhomogeneous magnetic field. Using the law of energy conservation and the balance condition for the number of hot electrons entering the discharge zone and cooled due to ionization and elastic collisions, the density of hot electrons was estimated and the dependence of the longitudinal temperature T _e∥ of the main (cold) electron component on the energy fraction β lost for radiation was obtained.     

Simulation of nonstationary phenomena in atmospheric-pressure glow discharge

Nonstationary processes in atmospheric-pressure glow discharge manifest themselves in spontaneous transitions from the normal glow discharge into a spark. In the experiments, both so-called completed transitions in which a highly conductive constricted channel arises and incomplete transitions accompanied by the formation of a diffuse channel are observed. A model of the positive column of a discharge in air is elaborated that allows one to interpret specific features of the discharge both in the stationary stage and during its transition into a spark and makes it possible to calculate the characteristic oscillatory current waveforms for completed transitions into a spark and aperiodic ones for incomplete transitions. The calculated parameters of the positive column in the glow discharge mode agree well with experiment. Data on the densities of the most abundant species generated in the discharge (such as atomic oxygen, metastable nitrogen molecules, ozone, nitrogen oxides, and negative oxygen ions) are presented.     

Investigation of the helicon discharge plasma parameters in a hybrid RF plasma system

Results of an experimental study of the helicon discharge plasma parameters in a prototype of a hybrid RF plasma system equipped with a solenoidal antenna are described. It is shown that an increase in the external magnetic field leads to the formation of a plasma column and a shift of the maximum ion current along the discharge axis toward the bottom flange of the system. The shape of the plasma column can be controlled via varying the configuration of the magnetic field.     

Charging of dust grains in a nonequilibrium plasma of a stratified glow discharge

A theoretical model is presented that describes the charging of dust grains in the positive plasma column of a stratified glow dc discharge in argon. A one-dimensional self-consistent model is used to obtain axial profiles of the electric field, as well as the electron energy distribution function along the axis of the discharge tube. Radial profiles of the electric field are determined in the ambipolar diffusion approximation. It is assumed that, in the radial direction, the electron distribution function depends only on the total electron energy. Two-dimensional distributions of the discharge plasma parameters are calculated and used to determine the potential and charge of a test dust grain at a certain point within the discharge and the electrostatic forces acting on it. It is shown that the grain charge distribution depends strongly on the nonequilibrium electron distribution function and on the nonuniform distribution of the electric field in a stratified glow discharge. A discussion is presented on the suspension of dust grains, the separation of grains by size in the discharge striations, and a possible mechanism for the onset of vortex dust motion at the edge of a dust cloud.     

Specific features of a single-pulse sliding discharge in neon near the threshold for spark breakdown

Experimental data on the spatial structure of a single-pulse sliding discharge in neon at voltages below, equal to, and above the threshold for spark breakdown are discussed. The experiments were carried at gas pressures of 30 and 100 kPa and different polarities of the discharge voltage. Photographs of the plasma structure in two discharge chambers with different dimensions of the discharge zone and different thicknesses of an alumina dielectric plate on the surface of which the discharge develops are inspected. Common features of the prebreakdown discharge and its specific features depending on the voltage polarity and gas pressure are analyzed. It is shown that, at voltages below the threshold for spark breakdown, a low-current glow discharge with cathode and anode spots develops in the electrode gap. Above the breakdown threshold, regardless of the voltage polarity, spark channels directed from the cathode to the anode develop against the background of a low-current discharge.     

Study of the dark phase in the initial stage of the positive column formation in a neon glow discharge

The initial stage of the positive column formation in a neon glow discharge is investigated both experimentally and theoretically. A decrease in the plasma radiation intensity (the so-called “dark phase”) was observed experimentally over a time period of about 1 ms. A similar dip was also observed in the time dependence of the electric field strength. The measured population of the lower metastable states of Ne was found to have a maximum at the beginning of the dark phase. A relevant theoretical model has been developed and used to perform calculations for the actual experimental conditions. A comparison between the numerical and experimental results shows that the model adequately describes the processes that occur during the formation of the positive column in a neon glow discharge. Experimental and theoretical studies show that the dark-phase effect is related to the excessive amount of metastable Ne atoms at the beginning of a discharge and, accordingly, to the high rates of stepwise ionization and chemionization.