Effect of hydrogen ratio on plasma parameters of N2-H2 gas mixture glow discharge

A dc plane glow discharge in a nitrogen-hydrogen (N₂-H₂) gas mixture has been operated at discharge currents of 10 and 20 mA. The electron energy distribution function (EEDF) at different hydrogen concentrations is measured. A Maxwellian EEDF is found in the positive column region, while in both cathode fall and negative glow regions, a non-Maxwellian one is observed. Langmuir electric probes are used at different axial positions, gas pressures, and hydrogen concentrations to measure the electron temperature and plasma density. The electron temperature is found to increase with increasing H₂ concentration and decrease with increasing both the axial distance from the cathode and the mixture pressure. At first, with increasing distance from the cathode, the ion density decreases, while the electron density increases; then, as the anode is further approached, they remain nearly constant. At different H₂ concentrations, the electron and ion densities decrease with increasing the mixture pressure. Both the electron and ion densities slightly decrease with increasing H₂ concentration.     

A Large-area dc Grid Anode Glow Discharge in Helium

Plasma Physics Reports - A grid anode glow discharge is a promising source of plasma for absorbing electromagnetic radiation. This paper presents an experimental study of a large-area dc grid anode...     

Self-sustained low pressure glow discharge with a hollow cathode at currents of tens of amperes

Self-sustained glow discharge with a hollow cathode was studied at high discharge currents (up to 30 A). Using a grid analyzer placed on the side flange of the hollow cathode, the ion and electron currents flowing in the cathode sheath were measured. At a discharge current of 30 A, pressure of 0.2?C2 Pa, and plasma density of 10¹¹ cm^?3, the coefficient of secondary ion-electron emission ?? calculated from the experimental data is found to be 0.1?C0.15. The dependences of the plasma parameters on the area of the small anode placed inside the larger hollow cathode are determined.     

Analysis of cylindrical Langmuir probe using experiment and different theories

Cylindrical probe data have been analyzed using different theories in order to determine some plasma parameters (electron temperature and electron and ion densities). Langmuir probe data are obtained in a cylindrical DC glow discharge in the positive column plasma at argon gas pressures varied from 0.5 to 6 Torr and at constant discharge current equal to 10 mA. The electron density has calculated from the electron current at the space potential and from Orbital Motion Limited (OML) collisionless theory. Ion density has obtained from the OML analysis of the ion saturation currents. In addition, the electron temperature has measured by three different methods using probe and electrons currents. The electron temperature T _e , plasma density n _e , and space potential V _s , have been obtained from the measured single cylindrical probe I–V characteristic curves. The radial distribution of the electron temperature and plasma density along the glow discharge are measured and discussed. Using the collisionless theories by Langmuir cylindrical probe and up to several Torr argon gas pressures the differences between the values of electron temperature and electron and ion densities stay within reasonable error limits.     

Low-pressure glow discharge in a Xenon/Chlorine mixture

The spatial, electrical, and optical characteristics of a transverse glow discharge and a volume discharge with a spherical anode and plane cathode in low-pressure Xe/Cl₂ mixtures are studied. It is shown that the transverse glow discharge in mixtures with a low chlorine content occupies most of the interelectrode gap and exists in the form of strata. As the total pressure (P≥300 Pa) and the partial chlorine pressure (P(Cl₂)≥80 Pa) increase, a solitary plasma domain with a volume of 1–2 cm³ forms in the discharge gap. It acts as a selective source of UV radiation in the XeCl(D-X) 236-nm, Cl₂ (D′-A′) 257-nm, and XeCl(B-X) 308-nm bands. In certain Xe/Cl₂ mixtures, plasma self-oscillations in the frequency range 1–100 kHz are observed. The current of a low-pressure volume discharge with a spherical anode and plane cathode and the emission from it have both a dc and an ac component. The pressure and composition of the working mixture, as well as the average current of the volume discharge are optimized to attain the maximum emission intensity of the XeCl(D,B-X) bands. Low-pressure volume discharges in xenon/chlorine mixtures can be used as active media in low-pressure large-aperture planar or cylindrical excimer-halogen lamps emitting modulated or repetitive pulsed UV radiation.     

Determination of the electron density and electric field in the plasma of a low-pressure microwave electrode discharge in hydrogen from the measured spectral line intensities

The parameters of the plasma of a microwave electrode discharge in hydrogen at pressures of 1–8 torr and incident powers of 20–80 W are measured by the so-called “relative intensity” method. The method allows one to determine the electron density and electric field in plasma by measuring the relative intensities of the H_α, H_β, and 763.5-nm Ar line emission and calculating the electron-impact rate constants from the homogeneous Boltzmann equation. The measurements show that there are regions in the discharge where the electron density is higher (a bright electrode sheath) and lower (a spherical region) than the critical density for the frequency 2.45 GHz (n_cr～7×10¹⁰ cm^?3). Inside the spherical region, the electric field varies slightly over the radius and the electron density increases as the discharge boundary is approached. The observed discharge structure can be attributed to the presence of a self-sustained discharge zone (electrode sheath); a non-self-sustained discharge zone (spherical region); and a decaying plasma region, which is separated from the active discharge zone by an electric double layer.     

Measurements of the electron density and degree of plasma ionization in a plasma target based on a linear electric discharge in hydrogen

Laser interferometry methods were used to measure the density of free electrons and degree of plasma ionization in a hydrogen target intended for experiments on determining energy losses of heavy ion beams in an ionized matter. It is shown that the linear electron density can be varied in the range from 3.3 × 10¹⁷ to 1.3 × 10¹⁸ cm^?2 by varying the initial plasma parameters (the hydrogen pressure in the target and the discharge current). The error in measuring the linear electron density in the entire range of the varied plasma parameters was less than 1%. The maximum degree of plasma ionization achieved at the initial gas pressure of 1 mbar was 0.62 ± 0.05.     

Positive column of a glow discharge in neon with charged dust grains (a review)

The effect of charged micron-size dust grains (microparticles) on the electric parameters of the positive column of a low-pressure dc glow discharge in neon has been studied experimentally and numerically. Numerical analysis is carried out in the diffusion-drift approximation with allowance for the interaction of dust grains with metastable neon atoms. In a discharge with a dust grain cloud, the longitudinal electric field increases. As the number density of dust grains in an axisymmetric cylindrical dust cloud rises, the growth of the electric field saturates. It is shown that the contribution of metastable atoms to ionization is higher in a discharge with dust grains, in spite of the quenching of metastable atoms on dust grains. The processes of charging of dust grains and the dust cloud are considered. As the number density of dust grains rises, their charge decreases, while the space charge of the dust cloud increases. The results obtained can be used in plasma technologies involving microparticles.     

Influence of the plasma density and heating power on the intensity of electron cyclotron emission in the L-2M stellarator

Results are presented from experiments on studying the plasma behavior in the L-2M stellarator in regimes with a high power deposition in electrons during electron cyclotron heating at the second harmonic of the electron gyrofrequency (X mode) at heating powers of P _in=120–400 kW and average plasma densities from n _e≤3×10¹⁹ to 0.3×10¹⁹ m^?3. It is shown that, as the plasma density decreases and the heating power increases, the electron cyclotron emission spectrum is modified; this may be attributed to a deviation of the electron energy distribution from a Maxwellian and the generation of suprathermal electrons. At low plasma densities, the emission intensity at the second harmonic of the electron gyrofrequency increases, whereas the plasma energy measured by diamagnetic diagnostics does not increase. This poses the question of the correctness of determining the plasma electron temperature by electron cyclotron emission diagnostics under these conditions.     

Generation of uniform low-temperature plasma in a pulsed non-self-sustained glow discharge with a large-area hollow cathode

Generation of plasma in a pulsed non-self-sustained glow discharge with a hollow cathode with an area of ≥2 m² at gas pressures of 0.4–1 Pa was studied experimentally. At an auxiliary arc-discharge current of 100 A and a main discharge voltage of 240 V, a pulse-periodic glow discharge with a current amplitude of 370 A, pulse duration of 340 μs, and repetition rate of 1 kHz was obtained. The possibility of creating a uniform gas-discharge plasma with a density of up to 10¹² cm^?3 and an electron temperature of 1 eV in a volume of >0.2 m³ was demonstrated. Such plasma can be efficiently used to treat material surfaces and generate pulsed ion beams with a current density of up to 15 mA/cm².     

Experimental study of a low-pressure glow discharge in air in large-diameter discharge tubes: I. conditions for the normal regime of a glow discharge

The initiation and characteristics of a low-pressure glow discharge in air in large-diameter discharge tubes are studied. A deviation from the Paschen law is observed: the breakdown curves U _dc(pL) shift toward the higher values of U _dc and pL as the interelectrode distance L increases. It is shown that the normal regime of a glow discharge is accompanied by gas ionization in the anode sheath. This takes place only for pL values lying to the right of the inflection point in the breakdown curve. The cathode-sheath characteristics in the normal and abnormal regimes of an air discharge for a duralumin cathode are determined. The axial profiles of the ion density, electron temperature, and plasma potential, as well as the anode voltage drop, are measured at various air pressures.     

Optical studies of plasma inhomogeneities in a high-current pulsed magnetron discharge

Results are presented for experimental studies of the plasma glow in a high-current pulsed magnetron discharge by using a high-speed optical frame camera. It is found that the discharge plasma is inhomogeneous in the azimuthal direction. The plasma bunches rotate with a linear velocity of ∼1 cm/μs in the direction of electron Hall drift, and their number is proportional to the discharge current. Plasma inhomogeneities in the form of plasma jets propagate in the form of plasma jets from the cathode region toward the anode. It is shown analytically that the formation of inhomogeneities is caused by the necessity to transfer high-density electron current across the magnetic field.     

Plasma Parameters Controlled by a Movable Ion Sheath

It is shown that plasma parameters, such as the electron density, electron temperature, and plasma potential, in multidipole discharge plasma can be controlled by a negatively biased movable metal plate. Here, plasma is produced in the target region by a flux of energetic electrons coming from the source region of a double plasma device. Further, the thickness of the ion sheath formed in front of the biased metal plate varies depending on its axial position inside the cage.     

Investigation of the electron energy distribution function in hollow-cathode glow discharges in nitrogen and oxygen

The mechanism for the formation of the inverse electron distribution function is proposed and realized experimentally in a nitrogen plasma of a hollow-cathode glow discharge. It is shown theoretically and experimentally that, for a broad range of the parameters of an N₂ discharge, it is possible to form a significant dip in the profile of the electron distribution function in the energy range ε=2–4 eV and, accordingly, to produce the inverse distribution with df(ε)/d?>0. The formation of a dip is associated with both the vibrational excitation of N₂ molecules and the characteristic features of a hollow-cathode glow discharge. In such a discharge, the applied voltage drops preferentially across a narrow cathode sheath. In the main discharge region, the electric field E is weak (E<0.1 V/cm at a pressure of about p～0.1 torr) and does not heat the discharge plasma. The gas is ionized and the ionization-produced electrons are heated by a beam of fast electrons (with an energy of about 400 eV) emitted from the cathode. A high-energy electron beam plays an important role in the formation of a dip in the profile of the electron distribution function in the energy range in which the cross section for the vibrational excitation of nitrogen molecules is maximum. A plasma with an inverted electron distribution function can be used to create a population inversion in which more impurity molecules and atoms will exist in electronically excited states.     

Effect of the electric field of the anode sheath on the growth of aligned carbon nanotubes in a glow discharge

Arrays of aligned carbon nanotubes on silicon substrates were grown in the anode sheath of a dc glow discharge. In order to clarify the role of the electric field in the growth of nanotubes, numerical simulations of charged particle transport in the anode sheath were carried out in the drift-diffusion approximation. The distributions of the charged particle density and electric field are obtained. Possible mechanisms whereby the electric field influences the growth of aligned carbon nanotubes are analyzed. It is found that the nanotubes grow in the region in which the electric field is enhanced due to the depletion of positive ions in the anode sheath.     

Study of a cumulative jet in a plasma focus discharge by the method of shearing interferometry

The dynamics of the cumulative jet formed in the course of plasma compression in a plasma focus discharge is investigated by the method of differential optical interferometry. The jet propagation velocity is found to be V = (2.3?C3) × 10⁷ cm/s, which coincides with the results of calculations performed in a 2D ideal MHD model. Ejection of matter from the anode in the late stage of the discharge due to the interaction of the cumulative jet and the electron beam with the anode surface is observed.     

Hydrodynamic model of a dielectric-barrier discharge in pure chlorine

A one-dimensional hydrodynamic model of a dielectric-barrier discharge (DBD) in pure chlorine is developed, and the properties of the discharge are modeled. The discharge is excited in an 8-mm-long discharge gap between 2-mm-thick dielectric quartz layers covering metal electrodes. The DBD spatiotemporal characteristics at gas pressures of 15–100 Torr are modeled for the case in which a 100-kHz harmonic voltage with an amplitude of 8 kV is applied to the electrodes. The average power density deposited in the discharge over one voltage period is 2.5–5.8 W/cm³. It is shown that ions and electrons absorb about 95 and 5% of the discharge power, respectively. In this case, from 67 to 97% of the power absorbed by electrons is spent on the dissociation and ionization of Cl₂ molecules. Two phases can be distinguished in the discharge dynamics: the active (multispike) phase, which follows the breakdown of the discharge gap, and the passive phase. The active phase is characterized by the presence of multiple current spikes, a relatively high current, small surface charge density on the dielectrics, and large voltage drop across the discharge gap. The passive phase (with no current spikes) is characterized by a low current, large surface charge density on the dielectrics, and small voltage drop across the discharge gap. The peak current density in the spikes at all pressures is about 4 mA/cm². In the multispike phase, there are distinct space charge sheaths with thicknesses of 1.5–1.8 mm and a mean electron energy of 4.3–7 eV and the central region of quasineutral plasma with a weak electric field and a mean electron energy of 0.8–3 eV. The degree of ionization of chlorine molecules in the discharge is ~0.02% at a pressure of 15 Torr and ~0.01% at 100 Torr. The DBD plasma is electronegative due to the fast attachment of electrons to chlorine atoms: e + Cl₂ → Cl + Cl^–. The most abundant charged particles are Cl ₂ ⁺ and Cl^? ions, and the degree of ionization during current spikes in the active phase is (4.1–5.5) × 10^–7. The mechanism of discharge sustainment is analyzed. The appearance of a series of current spikes in the active phase of the discharge is explained.     

Creation of a long magnetized plasma column in a metal chamber

A method for creation of a long magnetized column of dense hydrogen plasma in a metal chamber by means of a high-current linear discharge is considered. It is the main method for the formation of preliminary plasma in the GOL-3 multimirror trap, in which a plasma column with a length of up to 12 m and diameter of 8 cm, suitable for conducting experiments on the injection of a relativistic electron beam, was obtained. Conditions for stable discharge operation in the density range of 3 × 10¹⁹–10²² m^?3 are determined, including a discharge with a uniform longitudinal plasma density profile and incomplete initial ionization of hydrogen. It is demonstrated that the system is capable of operating in a magnetic field with a variable configuration and strength of up to 6 T in the solenoidal section and up to 12 T in the end mirrors. It is shown that an important role in the development of a discharge is played by fast electrons with energies corresponding to the initial applied voltage (about 25 kV), which provide primary gas ionization. The properties of low-temperature plasma in such a discharge are discussed.     

Filling the vacuum chamber of a technological system with homogeneous plasma using a stationary glow discharge

Experimental study of a glow discharge with electrostatic confinement of electrons is carried out in the vacuum chamber volume V ≈ 0.12 m³ of a technological system “Bulat-6” in argon pressure range 0.005–5 Pa. The chamber is used as a hollow cathode of the discharge with the inner surface area S ≈ 1.5 m². It is equipped with two feedthroughs, which make it possible to immerse in the discharge plasma interchangeable anodes with surface area S _a ranging from ∼0.001 to ∼0.1 m², as well as floating electrodes isolated from both the chamber and the anode. Dependences of the cathode fall U _c = 0.4−3 kV on the pressure p at a constant discharge current in the range I = 0.2−2 A proved that aperture of the electron escape out of the electrostatic trap is equal to the sum S _o = S _a + S _f of the anode surface S _a and the floating electrode surface S _f . The sum S _o defines the lower limit p _o of the pressure range, in which U _c is independent of p. At p < p _o the cathode fall U _c grows up dramatically, when the pressure decreases, and the pressure p tends to the limit p ^ex, which is in fact the discharge extinction pressure. At p ≈ p ^ex electrons emitted by the cathode and the first generation of fast electrons produced in the cathode sheath spend almost all their energy up to 3 keV on heating the anode and the floating electrode up to 600–800°C and higher. In this case the gas in the chamber is being ionized by the next generations of electrons produced in the cathode sheath, their energy being one order of magnitude lower. When S _a < (2m/M)^1/2 S, where m is the electron mass and M is the ion mass, the anode may be additionally heated by plasma electrons accelerated by the anode fall of potential U _a up to 0.5 kV.     

Effect of the nonlocal nature of the electron energy spectrum on the dissociation of oxygen molecules in a discharge

The effect of the nonlocal nature of the electron distribution function on the dissociation rate of oxygen molecules in a dc glow discharge is studied. The concentration of oxygen atoms and the probability of their loss at the discharge tube wall are measured as functions of the discharge parameters by means of the timeresolved actinometric method involving argon atoms. An analysis of the measurement data in terms of both a discharge model in which the effect of the nonlocal nature of the electron energy spectrum is taken into account and a model in which this effect is ignored makes it possible to thoroughly investigate the balance of oxygen atoms in the discharge. The production rate of O(³P) atoms and their concentration in the plasma are calculated with allowance for the nonlocal nature of the electron energy distribution function. The calculated values agree well with the experimental data and differ substantially from those obtained using a spatially homogeneous distribution function.