Affiliation: | 1. Laboratory for MEMS Applications, IMTEK Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany;2. HSG‐IMIT Institut für Mikro‐ und Informationstechnik der Hahn‐Schickar, d‐Gesellschaft e.V., Freiburg, Germany;3. Department of Chemical Engineering, Brigham Young University, UT, USA;4. Helmholtz Zentrum Berlin, Berlin, Germany;5. BIOSS‐ Centre for Biological Signalling Studies, University Freiburg, Freiburg, Germany |