Electro-absorption Modulator with Dual Carrier Accumulation Layers Based on Epsilon-Near-Zero ITO

An electro-absorption modulator based on indium tin oxide is proposed by constructing a waveguide consisting of metal-dielectric-ITO-dielectric-Si stack. Applying a negative voltage bias on the ITO layer, carrier accumulation occurs at both dielectric-ITO interfaces, which dramatically changes the guided mode properties due to the epsilon-near-zero effect. By tuning the real part of the permittivity around zero, the guided plasmonic mode concentrates in either ITO or dielectric layers, resulting in a high propagation loss. These dual carrier accumulation layers significantly improve the extinction ratio of the modulator. A further improvement is obtained by using high refractive index dielectric thin layers, which provides a strong optical confinement in the carrier accumulation layers. The dual carrier accumulation layer device shows a 200 % increase of the modulation efficiency compared to a single accumulation layer design. A modulation depth of 9.9 dB/μm can be achieved by numerical simulation.