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Electrical Characteristics of Capacitive Coupled Radio Frequency Discharges in Argon and Hydrogen |
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| Authors: | Murat Tanışlı Şahin Neslihan Demir Süleyman Mertadam Sercan |
| Affiliation: | 1.Anadolu University, Science Faculty, Department of Physics, Yunusemre Campus, 26470, Eskişehir, Turkey ; |
| Abstract: | Plasma Physics Reports - A symmetric radio frequency (RF) (13.56 MHz) electrode discharge system with different geometry has been investigated at low pressure. All electrical properties of... |
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