A High Performance Plasmonic Sensor Based on Metal-Insulator-Metal Waveguide Coupled with a Double-Cavity Structure

A high performance plasmonic sensor based on a metal-insulator-metal (MIM) waveguide coupled with a double-cavity structure consisting of a side-coupled rectangular cavity and a disk cavity is proposed. The transmission characteristics of the rectangular cavity and disk cavity are analyzed theoretically and the improvements of performance for the double-cavity structure compared with a single cavity are studied. The influence of structural parameters on the transmission spectra and sensing performance are investigated in detail. A sensitivity of 1136 nm/RIU with a high figure of merit of 51,275 can be achieved at the resonant wavelength of 1148.5 nm. Due to the high performance and easy fabrication, the proposed structure may be applied in integrated optical circuits and on-chip nanosensors.