Formation of Thick Dense Yttrium Iron Garnet Films Using Aerosol Deposition |
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Authors: | Scooter D Johnson Evan R Glaser Fritz J Kub Charles R Eddy Jr |
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Institution: | 1.Power Electronics Branch, Naval Research Laboratory;2.Physics of Electronic Materials Branch, Naval Research Laboratory |
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Abstract: | Aerosol deposition (AD) is a thick-film deposition process that can produce layers up to several hundred micrometers thick with densities greater than 95% of the bulk. The primary advantage of AD is that the deposition takes place entirely at ambient temperature; thereby enabling film growth in material systems with disparate melting temperatures. This report describes in detail the processing steps for preparing the powder and for performing AD using the custom-built system. Representative characterization results are presented from scanning electron microscopy, profilometry, and ferromagnetic resonance for films grown in this system. As a representative overview of the capabilities of the system, focus is given to a sample produced following the described protocol and system setup. Results indicate that this system can successfully deposit 11 µm thick yttrium iron garnet films that are > 90% of the bulk density during a single 5 min deposition run. A discussion of methods to afford better control of the aerosol and particle selection for improved thickness and roughness variations in the film is provided. |
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Keywords: | Engineering Issue 99 aerosol deposition yttrium iron garnet microwave materials radio frequency materials thick film ferromagnetic resonance cold spray coating room temperature ceramics multifunctional materials ferrites oxides |
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