Affiliation: | 1. Laboratory for MEMS Applications, IMTEK Department of Microsystems Engineering, University of Freiburg, Freiburg, Germany;2. Hahn‐Schickard, Villingen‐Schwenningen, Germany;3. Fraunhofer Institute for Solar Energy Systems, Freiburg, Germany;4. FIT, University of Freiburg, Freiburg, Germany |